Metrological technology is of extreme importance in micro-electro- mechanical systems (MEMS) engineering to ensure functionality and reliability of products. Due to the small size of the MEMS, the traditional method of metrology measurement seriously affects the feature parameter of the object being measured. In this paper, pattern analysis and classification for recognition of MEMS microstructure feature is developed. By means of edge detection, extraction of straight-line-based primitive characteristic and rectangle detection, it is feasible to recognize different MEMS surface features accurately.
|Number of pages||5|
|Journal||Key Engineering Materials|
|Publication status||Published - 11 Feb 2008|