Recognition of MEMS Microstructure Feature Based on Pattern Analysis and Classification

Xiang Qian Jiang, Kai Hu, Xiao Jun Liu

Research output: Contribution to journalArticlepeer-review


Metrological technology is of extreme importance in micro-electro- mechanical systems (MEMS) engineering to ensure functionality and reliability of products. Due to the small size of the MEMS, the traditional method of metrology measurement seriously affects the feature parameter of the object being measured. In this paper, pattern analysis and classification for recognition of MEMS microstructure feature is developed. By means of edge detection, extraction of straight-line-based primitive characteristic and rectangle detection, it is feasible to recognize different MEMS surface features accurately.

Original languageEnglish
Pages (from-to)555-559
Number of pages5
JournalKey Engineering Materials
Volume364-366 I
Publication statusPublished - 11 Feb 2008


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