Recognition of MEMS Microstructure Feature Based on Pattern Analysis and Classification

Xiang Qian Jiang, Kai Hu, Xiao Jun Liu

Research output: Contribution to journalArticle

Abstract

Metrological technology is of extreme importance in micro-electro- mechanical systems (MEMS) engineering to ensure functionality and reliability of products. Due to the small size of the MEMS, the traditional method of metrology measurement seriously affects the feature parameter of the object being measured. In this paper, pattern analysis and classification for recognition of MEMS microstructure feature is developed. By means of edge detection, extraction of straight-line-based primitive characteristic and rectangle detection, it is feasible to recognize different MEMS surface features accurately.

LanguageEnglish
Pages555-559
Number of pages5
JournalKey Engineering Materials
Volume364-366 I
Publication statusPublished - 11 Feb 2008

Fingerprint

Microstructure
Edge detection
Mechanical engineering
Systems engineering

Cite this

@article{418ff6c48d5548d4baba3af00d7d2c1e,
title = "Recognition of MEMS Microstructure Feature Based on Pattern Analysis and Classification",
abstract = "Metrological technology is of extreme importance in micro-electro- mechanical systems (MEMS) engineering to ensure functionality and reliability of products. Due to the small size of the MEMS, the traditional method of metrology measurement seriously affects the feature parameter of the object being measured. In this paper, pattern analysis and classification for recognition of MEMS microstructure feature is developed. By means of edge detection, extraction of straight-line-based primitive characteristic and rectangle detection, it is feasible to recognize different MEMS surface features accurately.",
keywords = "Hough Transform, MEMS, Microstructure, Pattern Analysis",
author = "Jiang, {Xiang Qian} and Kai Hu and Liu, {Xiao Jun}",
year = "2008",
month = "2",
day = "11",
language = "English",
volume = "364-366 I",
pages = "555--559",
journal = "Key Engineering Materials",
issn = "1013-9826",
publisher = "Trans Tech Publications",

}

Recognition of MEMS Microstructure Feature Based on Pattern Analysis and Classification. / Jiang, Xiang Qian; Hu, Kai; Liu, Xiao Jun.

In: Key Engineering Materials, Vol. 364-366 I, 11.02.2008, p. 555-559.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Recognition of MEMS Microstructure Feature Based on Pattern Analysis and Classification

AU - Jiang, Xiang Qian

AU - Hu, Kai

AU - Liu, Xiao Jun

PY - 2008/2/11

Y1 - 2008/2/11

N2 - Metrological technology is of extreme importance in micro-electro- mechanical systems (MEMS) engineering to ensure functionality and reliability of products. Due to the small size of the MEMS, the traditional method of metrology measurement seriously affects the feature parameter of the object being measured. In this paper, pattern analysis and classification for recognition of MEMS microstructure feature is developed. By means of edge detection, extraction of straight-line-based primitive characteristic and rectangle detection, it is feasible to recognize different MEMS surface features accurately.

AB - Metrological technology is of extreme importance in micro-electro- mechanical systems (MEMS) engineering to ensure functionality and reliability of products. Due to the small size of the MEMS, the traditional method of metrology measurement seriously affects the feature parameter of the object being measured. In this paper, pattern analysis and classification for recognition of MEMS microstructure feature is developed. By means of edge detection, extraction of straight-line-based primitive characteristic and rectangle detection, it is feasible to recognize different MEMS surface features accurately.

KW - Hough Transform

KW - MEMS

KW - Microstructure

KW - Pattern Analysis

UR - http://www.scopus.com/inward/record.url?scp=38849184038&partnerID=8YFLogxK

M3 - Article

VL - 364-366 I

SP - 555

EP - 559

JO - Key Engineering Materials

T2 - Key Engineering Materials

JF - Key Engineering Materials

SN - 1013-9826

ER -