Relationship between mechanical properties of thin nitride-based films and their behaviour in nano-scratch tests

Keyphrases

• Mechanical Properties 100%
• Nanoscratch Test 100%
• Nitrides 100%
• Hard Film 100%
• Shear Force 33%
• High-resolution Transmission Electron Microscopy (HRTEM) 33%
• High Ratio 33%
• Ion Beam 33%
• Nanoindentation 33%
• Beam System 33%
• Delamination 33%
• Toughness 33%
• Nanoscratch 33%
• High Mass Loading 33%
• Compositional Changes 33%
• Optimum Combination 33%
• Dual-ion 33%
• Low Plasticity 33%
• Shear Strain 33%
• Ion Assistance 33%
• Progressive Loading 33%
• Sliding Properties 33%
• Scratching Behavior 33%
• Plasticity Index 33%
• Nitrogen Ions 33%
• Inter-grain 33%
• Film Behaviour 33%
• High Shear 33%

Material Science

• Film 100%
• Nitride Compound 100%
• Scanning Electron Microscopy 10%
• Silicon 10%
• Nanoindentation 10%
• Delamination 10%
• Scratch Testing 10%