Relationship between mechanical properties of thin nitride-based films and their behaviour in nano-scratch tests

Engineering & Materials Science

• Nitrides 100%
• Mechanical properties 53%
• High resolution electron microscopy 15%
• Hardness 14%
• Ion beams 13%
• Nanoindentation 11%
• Shearing 9%
• Delamination 9%
• Toughness 8%
• Plasticity 8%
• Nitrogen 8%
• Ions 8%
• Scanning electron microscopy 7%
• Silicon 7%
• Testing 4%

Physics & Astronomy

• nitrides 76%
• mechanical properties 55%
• hardness 14%
• nitrogen ions 11%
• toughness 9%
• shearing 9%
• nanoindentation 9%
• sliding 8%
• plastic properties 8%
• ion beams 7%
• scanning electron microscopy 5%
• high resolution 5%
• silicon 4%

Chemistry

• Liquid Film 39%
• Delamination 10%
• Plastic Property 10%
• Ion Beam 10%
• Strain 6%
• Force 6%
• Nitrogen 5%
• Scanning Electron Microscopy 5%
• Ion 3%
• Application 2%