Review of the mathematical foundations of data fusion techniques in surface metrology

Jian Wang, Richard K. Leach, X. Jiang

Research output: Contribution to journalReview article

31 Citations (Scopus)

Abstract

The recent proliferation of engineered surfaces, including freeform and structured surfaces, is challenging current metrology techniques. Measurement using multiple sensors has been proposed to achieve enhanced benefits, mainly in terms of spatial frequency bandwidth, which a single sensor cannot provide. When using data from different sensors, a process of data fusion is required and there is much active research in this area. In this paper, current data fusion methods and applications are reviewed, with a focus on the mathematical foundations of the subject. Common research questions in the fusion of surface metrology data are raised and potential fusion algorithms are discussed.

Original languageEnglish
Article numbere023001
JournalSurface Topography: Metrology and Properties
Volume3
Issue number2
DOIs
Publication statusPublished - 1 Apr 2015

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