Self-assembled hexagonal ordering of Si nanocrystals embedded in SiO2nanodots

A. G. Nassiopoulou; V. V. Gianneta; M. Huffman; M. A. Reading; J. A. Van Den Berg; I. Tsiaoussis; N. Frangis

doi:10.1088/0957-4484/19/49/495605

Self-assembled hexagonal ordering of Si nanocrystals embedded in SiO2nanodots

A. G. Nassiopoulou, V. V. Gianneta, M. Huffman, M. A. Reading, J. A. Van Den Berg, I. Tsiaoussis, N. Frangis

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

Highly dense hexagonally ordered two-dimensional arrays of Si nanocrystals embedded in SiO2nanodots were fabricated on a silicon substrate by using a self-assembled porous anodic alumina thin film as a masking layer through which electrochemical oxidation of the Si substrate and ultralow energy Si implantation took place. After removal of the alumina film and high temperature annealing of the samples, hexagonally ordered Si nanocrystals embedded within SiO2nanodots were obtained, having sizes in the few tens of nanometer range. The fabricated ordered structures show significant potential for applications either in basic physics experiments or as building blocks for nanoelectronic and nanophotonic devices.

Original language	English
Article number	495605
Journal	Nanotechnology
Volume	19
Issue number	49
DOIs	https://doi.org/10.1088/0957-4484/19/49/495605
Publication status	Published - 19 Nov 2008
Externally published	Yes

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@article{4f32d92a09664a4f81b6f869cb3c616d,

title = "Self-assembled hexagonal ordering of Si nanocrystals embedded in SiO2nanodots",

abstract = "Highly dense hexagonally ordered two-dimensional arrays of Si nanocrystals embedded in SiO2nanodots were fabricated on a silicon substrate by using a self-assembled porous anodic alumina thin film as a masking layer through which electrochemical oxidation of the Si substrate and ultralow energy Si implantation took place. After removal of the alumina film and high temperature annealing of the samples, hexagonally ordered Si nanocrystals embedded within SiO2nanodots were obtained, having sizes in the few tens of nanometer range. The fabricated ordered structures show significant potential for applications either in basic physics experiments or as building blocks for nanoelectronic and nanophotonic devices. ",

author = "Nassiopoulou, {A. G.} and Gianneta, {V. V.} and M. Huffman and Reading, {M. A.} and {Van Den Berg}, {J. A.} and I. Tsiaoussis and N. Frangis",

year = "2008",

month = nov,

day = "19",

doi = "10.1088/0957-4484/19/49/495605",

language = "English",

volume = "19",

journal = "Nanotechnology",

issn = "0957-4484",

publisher = "IOP Publishing Ltd.",

number = "49",

}

TY - JOUR

T1 - Self-assembled hexagonal ordering of Si nanocrystals embedded in SiO2nanodots

AU - Nassiopoulou, A. G.

AU - Gianneta, V. V.

AU - Huffman, M.

AU - Reading, M. A.

AU - Van Den Berg, J. A.

AU - Tsiaoussis, I.

AU - Frangis, N.

PY - 2008/11/19

Y1 - 2008/11/19

N2 - Highly dense hexagonally ordered two-dimensional arrays of Si nanocrystals embedded in SiO2nanodots were fabricated on a silicon substrate by using a self-assembled porous anodic alumina thin film as a masking layer through which electrochemical oxidation of the Si substrate and ultralow energy Si implantation took place. After removal of the alumina film and high temperature annealing of the samples, hexagonally ordered Si nanocrystals embedded within SiO2nanodots were obtained, having sizes in the few tens of nanometer range. The fabricated ordered structures show significant potential for applications either in basic physics experiments or as building blocks for nanoelectronic and nanophotonic devices.

AB - Highly dense hexagonally ordered two-dimensional arrays of Si nanocrystals embedded in SiO2nanodots were fabricated on a silicon substrate by using a self-assembled porous anodic alumina thin film as a masking layer through which electrochemical oxidation of the Si substrate and ultralow energy Si implantation took place. After removal of the alumina film and high temperature annealing of the samples, hexagonally ordered Si nanocrystals embedded within SiO2nanodots were obtained, having sizes in the few tens of nanometer range. The fabricated ordered structures show significant potential for applications either in basic physics experiments or as building blocks for nanoelectronic and nanophotonic devices.

UR - http://www.scopus.com/inward/record.url?scp=58149236817&partnerID=8YFLogxK

U2 - 10.1088/0957-4484/19/49/495605

DO - 10.1088/0957-4484/19/49/495605

M3 - Article

AN - SCOPUS:58149236817

VL - 19

JO - Nanotechnology

JF - Nanotechnology

SN - 0957-4484

IS - 49

M1 - 495605

ER -

Self-assembled hexagonal ordering of Si nanocrystals embedded in SiO2nanodots

Abstract

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