Shallow BF2 implants in Xe-bombardment-preamorphized Si: The interaction between Xe and F

M. Werner, J. A. Van Den Berg, D. G. Armour, G. Carter, T. Feudel, M. Herden, M. Bersani, D. Giubertoni, L. Ottaviano, C. Bongiorno, G. Mannino, P. Bailey, T. C.Q. Noakes

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10 Citations (Scopus)

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Physics & Astronomy