Si ultrashallow p+n junctions using low-energy boron implantation

A. Bousetta, J. A. Van Den Berg, D. G. Armour, P. C. Zalm

Research output: Contribution to journalArticlepeer-review

30 Citations (Scopus)

Fingerprint Dive into the research topics of 'Si ultrashallow p<sup>+</sup>n junctions using low-energy boron implantation'. Together they form a unique fingerprint.

Physics & Astronomy