Signal Denoising of MEMS Microstructure Profile

X. Q. Jiang, K. Hu, X. J. Liu

Research output: Contribution to journalArticlepeer-review

Abstract

A new signal-denoising approach based on DT-CWT (Dual-Tree Complex Wavelet Transform) is presented in this paper to extract feature information from microstructure profile. It takes advantage of shift invariance of DT-CWT, non-Gaussian probability distribution for the wavelet coefficients and the statistical dependencies between a coefficient and its parent. This approach substantially improved the performance of classical wavelet denoising algorithms, both in terms of SNR and in terms of visual artifacts. A simulated MEMS microstructure signal is analyzed.

Original languageEnglish
Pages (from-to)69-72
Number of pages4
JournalKey Engineering Materials
Volume381-382
Publication statusPublished - 17 Jul 2008

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