Silicon-nanocrystal-based multiple-tunnel junction devices obtained by a combination of V-groove and ion beam synthesis techniques

P. Normand, E. Kapetanakis, D. Tsoukalas, A. Tserepi, E. Tsoi, K. Beltsios, K. Aidinis, S. Zhang, J. Van Den Berg

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Multiple-tunnel junction devices with a source–drain electrode separation ranging from 50 to 200 nm and non-linear source–drain current–voltage characteristics, are constructed by a combination of optical lithography, anisotropic wet and dry etching and low-energy Si ion implantation. Electrical characteristics are found to depend strongly on the Si implantation dose and source–drain separation.

LanguageEnglish
Pages1003-1007
Number of pages5
JournalMicroelectronic Engineering
Volume57-58
DOIs
Publication statusPublished - Sep 2001
Externally publishedYes

Fingerprint

V grooves
Tunnel junctions
Silicon
tunnel junctions
Nanocrystals
Ion beams
nanocrystals
ion beams
Anisotropic etching
Dry etching
Wet etching
Drain current
Photolithography
silicon
synthesis
Current voltage characteristics
lithography
etching
dosage
Electrodes

Cite this

Normand, P. ; Kapetanakis, E. ; Tsoukalas, D. ; Tserepi, A. ; Tsoi, E. ; Beltsios, K. ; Aidinis, K. ; Zhang, S. ; Van Den Berg, J. / Silicon-nanocrystal-based multiple-tunnel junction devices obtained by a combination of V-groove and ion beam synthesis techniques. In: Microelectronic Engineering. 2001 ; Vol. 57-58. pp. 1003-1007.
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Silicon-nanocrystal-based multiple-tunnel junction devices obtained by a combination of V-groove and ion beam synthesis techniques. / Normand, P.; Kapetanakis, E.; Tsoukalas, D.; Tserepi, A.; Tsoi, E.; Beltsios, K.; Aidinis, K.; Zhang, S.; Van Den Berg, J.

In: Microelectronic Engineering, Vol. 57-58, 09.2001, p. 1003-1007.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Silicon-nanocrystal-based multiple-tunnel junction devices obtained by a combination of V-groove and ion beam synthesis techniques

AU - Normand, P.

AU - Kapetanakis, E.

AU - Tsoukalas, D.

AU - Tserepi, A.

AU - Tsoi, E.

AU - Beltsios, K.

AU - Aidinis, K.

AU - Zhang, S.

AU - Van Den Berg, J.

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T2 - Microelectronic Engineering

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