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Engineering & Materials Science
Nanocrystals
Ion implantation
Oxide films
Silicon
Silicon oxides
MOS devices
Electric current measurement
Electric properties
Transmission electron microscopy
Crystals
Annealing
Hot Temperature
Oxides
Temperature
Chemical Compounds
Nanocrystals
Ion implantation
Oxide films
Silicon
MOS devices
Oxides
Electric current measurement
Electric properties
Transmission electron microscopy
Crystals
Annealing
Hot Temperature
Temperature
Physics & Astronomy
ion implantation
oxide films
nanocrystals
silicon
silicon oxides
metal oxide semiconductors
semiconductor devices
electrical properties
dosage
transmission electron microscopy
oxides
annealing
energy
crystals