As a microanalytical technique, electron energy-loss (EEL) spectroscopy performed within a scanning transmission electron microscope (STEM) represents an outstanding method. The technique has led to remarkable success in spectroscopic chemical analysis. However, the question remains of whether the EEL signal of individual dopant atoms within a substrate can be detected, with simultaneous atomic-scale imaging of the microstructural surround. In the present contribution, results are presented of ultra-high spatially resolved EEL spectroscopy of ion implanted multi-walled carbon nanotubes (MWCNTs), performed within a Cs-corrected dedicated STEM. Quantifiable EEL signals with an absence of oversampling, suggest single implanted atoms were detected at certain locations.
Bangert, U., Bleloch, A. L., Gass, M., Van Den Berg, J., Harvey, A. J., & Seepujak, A. (2008). Single atom electron energy-loss spectroscopy of implanted ions in carbon nanotubes. Journal of Physics: Conference Series, 126, . https://doi.org/10.1088/1742-6596/126/1/012018