Single Shot Dual Wavelength Polarised Interferometer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper we present a single-shot Dual wavelength Polarised Interferometer (DPI)for measuring micro/nano-scale structured surfaces. The two wavelength interferometer is combined with a polarisation phase shift method to extend the 2π ambiguity range without any mechanical movement, enabling a single-shot approach to freeze any unwanted environmental disturbances. The measurement results of using cross grating of 200 nm, 500 nm, and 1200 nm depth is presented. A measurement of 40 nm step height also is presented. The system has the potential to be used for measuring moving surfaces with the measuring range being limited by synthetic wavelength.
Original languageEnglish
Title of host publication2018 IEEE International Instrumentation and Measurement Technology Conference (I2MTC)
PublisherIEEE
Pages353-358
Number of pages6
ISBN (Electronic)9781538622223
Publication statusAccepted/In press - 6 Feb 2018
Event2018 IEEE International Instrumentation & Measurement Technology Conference: Discovering New Horizons in Instrumentation and Measurement - Royal Sonesta Hotel, Houston, United States
Duration: 14 May 201817 May 2018
http://i2mtc2018.ieee-ims.org/ (Link to Conference Website)

Conference

Conference2018 IEEE International Instrumentation & Measurement Technology Conference
Abbreviated titleI2MTC
CountryUnited States
CityHouston
Period14/05/1817/05/18
Internet address

Fingerprint

shot
interferometers
wavelengths
ambiguity
phase shift
disturbances
gratings
polarization

Cite this

Muhamedsalih, H., Al-Bashir, S., Gao, F., & Jiang, X. (Accepted/In press). Single Shot Dual Wavelength Polarised Interferometer. In 2018 IEEE International Instrumentation and Measurement Technology Conference (I2MTC) (pp. 353-358). IEEE.
Muhamedsalih, Hussam ; Al-Bashir, Saif ; Gao, Feng ; Jiang, Xiangqian. / Single Shot Dual Wavelength Polarised Interferometer. 2018 IEEE International Instrumentation and Measurement Technology Conference (I2MTC). IEEE, 2018. pp. 353-358
@inproceedings{bc01f8b21d474e2a9189a1422cfa322e,
title = "Single Shot Dual Wavelength Polarised Interferometer",
abstract = "In this paper we present a single-shot Dual wavelength Polarised Interferometer (DPI)for measuring micro/nano-scale structured surfaces. The two wavelength interferometer is combined with a polarisation phase shift method to extend the 2π ambiguity range without any mechanical movement, enabling a single-shot approach to freeze any unwanted environmental disturbances. The measurement results of using cross grating of 200 nm, 500 nm, and 1200 nm depth is presented. A measurement of 40 nm step height also is presented. The system has the potential to be used for measuring moving surfaces with the measuring range being limited by synthetic wavelength.",
keywords = "Polarised interferometer, Dual Wavelength interferometer, single shot interferometer",
author = "Hussam Muhamedsalih and Saif Al-Bashir and Feng Gao and Xiangqian Jiang",
note = "{\circledC} {\circledC} 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.",
year = "2018",
month = "2",
day = "6",
language = "English",
pages = "353--358",
booktitle = "2018 IEEE International Instrumentation and Measurement Technology Conference (I2MTC)",
publisher = "IEEE",

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Muhamedsalih, H, Al-Bashir, S, Gao, F & Jiang, X 2018, Single Shot Dual Wavelength Polarised Interferometer. in 2018 IEEE International Instrumentation and Measurement Technology Conference (I2MTC). IEEE, pp. 353-358, 2018 IEEE International Instrumentation & Measurement Technology Conference, Houston, United States, 14/05/18.

Single Shot Dual Wavelength Polarised Interferometer. / Muhamedsalih, Hussam; Al-Bashir, Saif; Gao, Feng; Jiang, Xiangqian.

2018 IEEE International Instrumentation and Measurement Technology Conference (I2MTC). IEEE, 2018. p. 353-358.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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T1 - Single Shot Dual Wavelength Polarised Interferometer

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AU - Al-Bashir, Saif

AU - Gao, Feng

AU - Jiang, Xiangqian

N1 - © © 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

PY - 2018/2/6

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N2 - In this paper we present a single-shot Dual wavelength Polarised Interferometer (DPI)for measuring micro/nano-scale structured surfaces. The two wavelength interferometer is combined with a polarisation phase shift method to extend the 2π ambiguity range without any mechanical movement, enabling a single-shot approach to freeze any unwanted environmental disturbances. The measurement results of using cross grating of 200 nm, 500 nm, and 1200 nm depth is presented. A measurement of 40 nm step height also is presented. The system has the potential to be used for measuring moving surfaces with the measuring range being limited by synthetic wavelength.

AB - In this paper we present a single-shot Dual wavelength Polarised Interferometer (DPI)for measuring micro/nano-scale structured surfaces. The two wavelength interferometer is combined with a polarisation phase shift method to extend the 2π ambiguity range without any mechanical movement, enabling a single-shot approach to freeze any unwanted environmental disturbances. The measurement results of using cross grating of 200 nm, 500 nm, and 1200 nm depth is presented. A measurement of 40 nm step height also is presented. The system has the potential to be used for measuring moving surfaces with the measuring range being limited by synthetic wavelength.

KW - Polarised interferometer

KW - Dual Wavelength interferometer

KW - single shot interferometer

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Muhamedsalih H, Al-Bashir S, Gao F, Jiang X. Single Shot Dual Wavelength Polarised Interferometer. In 2018 IEEE International Instrumentation and Measurement Technology Conference (I2MTC). IEEE. 2018. p. 353-358