Single-Shot RGB Polarising Interferometer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A single shot RGB Multi-wavelength Polarizing Interferometer (MPI) is proposed for measuring moving precision surfaces with micro/nano-scale structured pattern or defects. The interferometer is combined with four CMOS cameras, each with an integrated Bayer filter, to capture four color phase shifted interferograms at a single exposure time. The phase shifting mechanism is achieved by using thin film linear polarizers and birefringent quarter-wave plates. The 2π phase ambiguity range is extended by using a synthetic wavelength produced from the RGB. Measurement of step height standard samples are also presented and compared to measurement obtained by Coherence Scanning Interferometer (CSI).

LanguageEnglish
Title of host publicationInterferometry XIX
Subtitle of host publicationProceedings of SPIE
EditorsKatherine Creath, Jan Burke, Angela D. Davies, Michael B. North Morris, Katherine Creath
PublisherSPIE
Number of pages6
Volume10749
ISBN (Electronic)9781510620698
DOIs
Publication statusPublished - 18 Aug 2018
EventInterferometry XIX - San Diego, United States
Duration: 21 Aug 201823 Aug 2018
Conference number: XIX
https://www.spie.org/OP18O/conferencedetails/interferometry?SSO=1 (Link to Conference Information)

Conference

ConferenceInterferometry XIX
CountryUnited States
CitySan Diego
Period21/08/1823/08/18
Internet address

Fingerprint

Interferometer
Interferometers
shot
interferometers
Wavelength
Interferogram
Phase Shifting
Bayes
polarizers
wavelengths
ambiguity
Thin Films
Scanning
CMOS
interferometry
Defects
Camera
Cameras
cameras
Filter

Cite this

Muhamedsalih, H., Al-Bashir, S., Gao, F., & Jiang, X. (2018). Single-Shot RGB Polarising Interferometer. In K. Creath, J. Burke, A. D. Davies, M. B. North Morris, & K. Creath (Eds.), Interferometry XIX: Proceedings of SPIE (Vol. 10749). [1074909] SPIE. https://doi.org/10.1117/12.2507354
Muhamedsalih, H. ; Al-Bashir, S. ; Gao, F. ; Jiang, X. / Single-Shot RGB Polarising Interferometer. Interferometry XIX: Proceedings of SPIE. editor / Katherine Creath ; Jan Burke ; Angela D. Davies ; Michael B. North Morris ; Katherine Creath. Vol. 10749 SPIE, 2018.
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title = "Single-Shot RGB Polarising Interferometer",
abstract = "A single shot RGB Multi-wavelength Polarizing Interferometer (MPI) is proposed for measuring moving precision surfaces with micro/nano-scale structured pattern or defects. The interferometer is combined with four CMOS cameras, each with an integrated Bayer filter, to capture four color phase shifted interferograms at a single exposure time. The phase shifting mechanism is achieved by using thin film linear polarizers and birefringent quarter-wave plates. The 2π phase ambiguity range is extended by using a synthetic wavelength produced from the RGB. Measurement of step height standard samples are also presented and compared to measurement obtained by Coherence Scanning Interferometer (CSI).",
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Muhamedsalih, H, Al-Bashir, S, Gao, F & Jiang, X 2018, Single-Shot RGB Polarising Interferometer. in K Creath, J Burke, AD Davies, MB North Morris & K Creath (eds), Interferometry XIX: Proceedings of SPIE. vol. 10749, 1074909, SPIE, Interferometry XIX, San Diego, United States, 21/08/18. https://doi.org/10.1117/12.2507354

Single-Shot RGB Polarising Interferometer. / Muhamedsalih, H.; Al-Bashir, S.; Gao, F.; Jiang, X.

Interferometry XIX: Proceedings of SPIE. ed. / Katherine Creath; Jan Burke; Angela D. Davies; Michael B. North Morris; Katherine Creath. Vol. 10749 SPIE, 2018. 1074909.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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T1 - Single-Shot RGB Polarising Interferometer

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AU - Al-Bashir, S.

AU - Gao, F.

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PY - 2018/8/18

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N2 - A single shot RGB Multi-wavelength Polarizing Interferometer (MPI) is proposed for measuring moving precision surfaces with micro/nano-scale structured pattern or defects. The interferometer is combined with four CMOS cameras, each with an integrated Bayer filter, to capture four color phase shifted interferograms at a single exposure time. The phase shifting mechanism is achieved by using thin film linear polarizers and birefringent quarter-wave plates. The 2π phase ambiguity range is extended by using a synthetic wavelength produced from the RGB. Measurement of step height standard samples are also presented and compared to measurement obtained by Coherence Scanning Interferometer (CSI).

AB - A single shot RGB Multi-wavelength Polarizing Interferometer (MPI) is proposed for measuring moving precision surfaces with micro/nano-scale structured pattern or defects. The interferometer is combined with four CMOS cameras, each with an integrated Bayer filter, to capture four color phase shifted interferograms at a single exposure time. The phase shifting mechanism is achieved by using thin film linear polarizers and birefringent quarter-wave plates. The 2π phase ambiguity range is extended by using a synthetic wavelength produced from the RGB. Measurement of step height standard samples are also presented and compared to measurement obtained by Coherence Scanning Interferometer (CSI).

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Muhamedsalih H, Al-Bashir S, Gao F, Jiang X. Single-Shot RGB Polarising Interferometer. In Creath K, Burke J, Davies AD, North Morris MB, Creath K, editors, Interferometry XIX: Proceedings of SPIE. Vol. 10749. SPIE. 2018. 1074909 https://doi.org/10.1117/12.2507354