Single-Shot RGB Polarising Interferometer

H. Muhamedsalih; S. Al-Bashir; F. Gao; X. Jiang

doi:10.1117/12.2507354

Single-Shot RGB Polarising Interferometer

H. Muhamedsalih, S. Al-Bashir, F. Gao, X. Jiang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

7 Citations (Scopus)

Abstract

A single shot RGB Multi-wavelength Polarizing Interferometer (MPI) is proposed for measuring moving precision surfaces with micro/nano-scale structured pattern or defects. The interferometer is combined with four CMOS cameras, each with an integrated Bayer filter, to capture four color phase shifted interferograms at a single exposure time. The phase shifting mechanism is achieved by using thin film linear polarizers and birefringent quarter-wave plates. The 2π phase ambiguity range is extended by using a synthetic wavelength produced from the RGB. Measurement of step height standard samples are also presented and compared to measurement obtained by Coherence Scanning Interferometer (CSI).

Original language	English
Title of host publication	Interferometry XIX
Editors	Katherine Creath, Jan Burke, Michael B. North Morris, Angela D. Davies
Publisher	SPIE
Number of pages	6
Volume	10749
ISBN (Electronic)	9781510620704
ISBN (Print)	9781510620698
DOIs	https://doi.org/10.1117/12.2507354
Publication status	Published - 18 Aug 2018
Event	SPIE Optical Engineering + Applications - San Diego, United States Duration: 19 Aug 2018 → 23 Aug 2018 Conference number: XIX https://www.spie.org/OP18O/conferencedetails/interferometry?SSO=1 (Link to Conference Information)

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Publisher	SPIE
Volume	10749
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	SPIE Optical Engineering + Applications
Country/Territory	United States
City	San Diego
Period	19/08/18 → 23/08/18
Internet address	https://www.spie.org/OP18O/conferencedetails/interferometry?SSO=1 (Link to Conference Information)

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1117/12.2507354Licence: Unspecified

Cite this

@inproceedings{b07d91a44be14eafbc60ba57d09b1fe0,

title = "Single-Shot RGB Polarising Interferometer",

abstract = "A single shot RGB Multi-wavelength Polarizing Interferometer (MPI) is proposed for measuring moving precision surfaces with micro/nano-scale structured pattern or defects. The interferometer is combined with four CMOS cameras, each with an integrated Bayer filter, to capture four color phase shifted interferograms at a single exposure time. The phase shifting mechanism is achieved by using thin film linear polarizers and birefringent quarter-wave plates. The 2π phase ambiguity range is extended by using a synthetic wavelength produced from the RGB. Measurement of step height standard samples are also presented and compared to measurement obtained by Coherence Scanning Interferometer (CSI).",

keywords = "multi-wavelength interferometer, optical metrology, polarizing interferometer, RGB, single-shot, surface measurement",

author = "H. Muhamedsalih and S. Al-Bashir and F. Gao and X. Jiang",

year = "2018",

month = aug,

day = "18",

doi = "10.1117/12.2507354",

language = "English",

isbn = "9781510620698",

volume = "10749",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

editor = "Katherine Creath and Jan Burke and {North Morris}, {Michael B.} and Davies, {Angela D.}",

booktitle = "Interferometry XIX",

address = "United States",

note = "SPIE Optical Engineering + Applications ; Conference date: 19-08-2018 Through 23-08-2018",

url = "https://www.spie.org/OP18O/conferencedetails/interferometry?SSO=1",

}

Muhamedsalih, H, Al-Bashir, S, Gao, F & Jiang, X 2018, Single-Shot RGB Polarising Interferometer. in K Creath, J Burke, MB North Morris & AD Davies (eds), Interferometry XIX. vol. 10749, 1074909, Proceedings of SPIE - The International Society for Optical Engineering, vol. 10749, SPIE, SPIE Optical Engineering + Applications, San Diego, California, United States, 19/08/18. https://doi.org/10.1117/12.2507354

Single-Shot RGB Polarising Interferometer. / Muhamedsalih, H.; Al-Bashir, S.; Gao, F. et al.

Interferometry XIX. ed. / Katherine Creath; Jan Burke; Michael B. North Morris; Angela D. Davies. Vol. 10749 SPIE, 2018. 1074909 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10749).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Single-Shot RGB Polarising Interferometer

AU - Muhamedsalih, H.

AU - Al-Bashir, S.

AU - Gao, F.

AU - Jiang, X.

N1 - Conference code: XIX

PY - 2018/8/18

Y1 - 2018/8/18

N2 - A single shot RGB Multi-wavelength Polarizing Interferometer (MPI) is proposed for measuring moving precision surfaces with micro/nano-scale structured pattern or defects. The interferometer is combined with four CMOS cameras, each with an integrated Bayer filter, to capture four color phase shifted interferograms at a single exposure time. The phase shifting mechanism is achieved by using thin film linear polarizers and birefringent quarter-wave plates. The 2π phase ambiguity range is extended by using a synthetic wavelength produced from the RGB. Measurement of step height standard samples are also presented and compared to measurement obtained by Coherence Scanning Interferometer (CSI).

AB - A single shot RGB Multi-wavelength Polarizing Interferometer (MPI) is proposed for measuring moving precision surfaces with micro/nano-scale structured pattern or defects. The interferometer is combined with four CMOS cameras, each with an integrated Bayer filter, to capture four color phase shifted interferograms at a single exposure time. The phase shifting mechanism is achieved by using thin film linear polarizers and birefringent quarter-wave plates. The 2π phase ambiguity range is extended by using a synthetic wavelength produced from the RGB. Measurement of step height standard samples are also presented and compared to measurement obtained by Coherence Scanning Interferometer (CSI).

KW - multi-wavelength interferometer

KW - optical metrology

KW - polarizing interferometer

KW - RGB

KW - single-shot

KW - surface measurement

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U2 - 10.1117/12.2507354

DO - 10.1117/12.2507354

M3 - Conference contribution

AN - SCOPUS:85055658931

SN - 9781510620698

VL - 10749

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Interferometry XIX

A2 - Creath, Katherine

A2 - Burke, Jan

A2 - North Morris, Michael B.

A2 - Davies, Angela D.

PB - SPIE

T2 - SPIE Optical Engineering + Applications

Y2 - 19 August 2018 through 23 August 2018

ER -

Single-Shot RGB Polarising Interferometer

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Hussam Muhamedsalih

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Single-Shot RGB Polarising Interferometer

Abstract

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UN SDGs

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Hussam Muhamedsalih

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