Single-Shot RGB Polarising Interferometer

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

7 Citations (Scopus)


A single shot RGB Multi-wavelength Polarizing Interferometer (MPI) is proposed for measuring moving precision surfaces with micro/nano-scale structured pattern or defects. The interferometer is combined with four CMOS cameras, each with an integrated Bayer filter, to capture four color phase shifted interferograms at a single exposure time. The phase shifting mechanism is achieved by using thin film linear polarizers and birefringent quarter-wave plates. The 2π phase ambiguity range is extended by using a synthetic wavelength produced from the RGB. Measurement of step height standard samples are also presented and compared to measurement obtained by Coherence Scanning Interferometer (CSI).

Original languageEnglish
Title of host publicationInterferometry XIX
EditorsKatherine Creath, Jan Burke, Michael B. North Morris, Angela D. Davies
Number of pages6
ISBN (Electronic)9781510620704
ISBN (Print)9781510620698
Publication statusPublished - 18 Aug 2018
EventSPIE Optical Engineering + Applications - San Diego, United States
Duration: 19 Aug 201823 Aug 2018
Conference number: XIX (Link to Conference Information)

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceSPIE Optical Engineering + Applications
Country/TerritoryUnited States
CitySan Diego
Internet address


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