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Solid-phase epitaxial regrowth of a shallow amorphised Si layer studied by X-ray and medium energy ion scattering
L. Capello, T. H. Metzger, M. Werner, J. A. Van Den Berg, M. Servidori, M. Herden, T. Feudel
Research output: Contribution to journal › Article › peer-review
5
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(Scopus)