State-of-the-art active optical techniques for three-dimensional surface metrology: a review [Invited]

Andres G. Marrugo, Feng Gao, Song Zhang

Research output: Contribution to journalReview article

2 Citations (Scopus)

Abstract

This paper reviews recent developments of non-contact three-dimensional (3D) surface metrology using an active structured optical probe. We focus primarily on those active non-contact 3D surface measurement techniques that could be applicable to the manufacturing industry. We discuss principles of each technology, and its advantageous characteristics as well as limitations. Towards the end, we discuss our perspectives on the current technological challenges in designing and implementing these methods in practical applications.
Original languageEnglish
Pages (from-to)B60-B77
Number of pages18
JournalJournal of the Optical Society of America A: Optics and Image Science, and Vision
Volume37
Issue number9
Early online date7 Aug 2020
DOIs
Publication statusPublished - 1 Sep 2020

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