Stereo stitching deflectometry for measurement of specular surface with enlarged aperture

Ruiyang Wang, Feng Gao, Dahai Li, Jane Jiang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The measurement aperture of deflectometry is limited by the line of sight from the camera to the screen: only the aperture through which the camera can see the pattern displayed on the screen can be measured. A marker-free stereo stitching deflectometry (SSD) is proposed to enlarge the measurement aperture. The sub-apertures are calculated with a stereo-iterative algorithm, and then stitched together to reconstruct a full-aperture result. The measured area is significantly enlarged compared to conventional stereo deflectometry. We test a high-quality optical flat with 190mm diameter using the proposed SSD and an interferometer. The measurement error of the SSD is below 100nm RMS in comparison to the measurement result of the interferometer.
Original languageEnglish
Title of host publicationProceedings of the 22nd International Conference and Exhibition of the European Society for Precision Engineering and Nanotechnology
EditorsRichard Leach, A. Akrofi-Ayesu, C. Nesbit, D. Phillips
Publishereuspen
ChapterP5.12
Pages389-392
Number of pages4
ISBN (Electronic)9781998999118
Publication statusPublished - 30 May 2022
Event22nd International Conference of the European Society for Precision Engineering and Nanotechnology - CERN, Geneva, Switzerland
Duration: 30 May 20223 Jun 2022
Conference number: 22
https://www.euspen.eu/events/22nd-international-conference-exhibition/?subid=22nd-international-conference-exhibition

Conference

Conference22nd International Conference of the European Society for Precision Engineering and Nanotechnology
Country/TerritorySwitzerland
CityGeneva
Period30/05/223/06/22
Internet address

Fingerprint

Dive into the research topics of 'Stereo stitching deflectometry for measurement of specular surface with enlarged aperture'. Together they form a unique fingerprint.

Cite this