Stereo stitching deflectometry for measurement of specular surface with enlarged aperture

Ruiyang Wang; Feng Gao; Dahai Li; Jane Jiang

Stereo stitching deflectometry for measurement of specular surface with enlarged aperture

Ruiyang Wang, Feng Gao, Dahai Li, Jane Jiang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

The measurement aperture of deflectometry is limited by the line of sight from the camera to the screen: only the aperture through which the camera can see the pattern displayed on the screen can be measured. A marker-free stereo stitching deflectometry (SSD) is proposed to enlarge the measurement aperture. The sub-apertures are calculated with a stereo-iterative algorithm, and then stitched together to reconstruct a full-aperture result. The measured area is significantly enlarged compared to conventional stereo deflectometry. We test a high-quality optical flat with 190mm diameter using the proposed SSD and an interferometer. The measurement error of the SSD is below 100nm RMS in comparison to the measurement result of the interferometer.

Original language	English
Title of host publication	European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022
Editors	Richard K. Leach, A. Akrofi-Ayesu, C. Nisbet, Dishi Phillips
Publisher	euspen
Chapter	P5.12
Pages	389-392
Number of pages	4
ISBN (Electronic)	9781998999118
Publication status	Published - 30 May 2022
Event	22nd International Conference of the European Society for Precision Engineering and Nanotechnology - CERN, Geneva, Switzerland Duration: 30 May 2022 → 3 Jun 2022 Conference number: 22 https://www.euspen.eu/events/22nd-international-conference-exhibition/?subid=22nd-international-conference-exhibition

Conference

Conference	22nd International Conference of the European Society for Precision Engineering and Nanotechnology
Country/Territory	Switzerland
City	Geneva
Period	30/05/22 → 3/06/22
Internet address	https://www.euspen.eu/events/22nd-international-conference-exhibition/?subid=22nd-international-conference-exhibition

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

https://www.euspen.eu/knowledge-base/ICE22198.pdfLicence: Unspecified

Cite this

Wang, R., Gao, F., Li, D., & Jiang, J. (2022). Stereo stitching deflectometry for measurement of specular surface with enlarged aperture. In R. K. Leach, A. Akrofi-Ayesu, C. Nisbet, & D. Phillips (Eds.), European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022 (pp. 389-392). euspen. https://www.euspen.eu/knowledge-base/ICE22198.pdf

Wang, Ruiyang ; Gao, Feng ; Li, Dahai et al. / Stereo stitching deflectometry for measurement of specular surface with enlarged aperture. European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022. editor / Richard K. Leach ; A. Akrofi-Ayesu ; C. Nisbet ; Dishi Phillips. euspen, 2022. pp. 389-392

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title = "Stereo stitching deflectometry for measurement of specular surface with enlarged aperture",

abstract = "The measurement aperture of deflectometry is limited by the line of sight from the camera to the screen: only the aperture through which the camera can see the pattern displayed on the screen can be measured. A marker-free stereo stitching deflectometry (SSD) is proposed to enlarge the measurement aperture. The sub-apertures are calculated with a stereo-iterative algorithm, and then stitched together to reconstruct a full-aperture result. The measured area is significantly enlarged compared to conventional stereo deflectometry. We test a high-quality optical flat with 190mm diameter using the proposed SSD and an interferometer. The measurement error of the SSD is below 100nm RMS in comparison to the measurement result of the interferometer.",

keywords = "Optical metrology, deflectometry, sub-aperture stitching",

author = "Ruiyang Wang and Feng Gao and Dahai Li and Jane Jiang",

note = "Funding Information: The authors gratefully acknowledge the Chinese Government Scholarships (CSC), and the National Natural Science Foundation of China founding (U20A20215 and 61875142), and the Sichuan University funding (2020SCUNG205), and UK's Engineering and Physical Sciences Research Council (EPSRC) funding of {"}The EPSRC Future Advanced Metrology Hub{"} (EP/P006930/1), the funding of {"}A Multiscale Digital Twin-Driven Smart Manufacturing System for High Value-Added Products{"} (EP/T024844/1), and the funding of {"}Next Generation Metrology Driven by Nanophotonics{"} (EP/T02643X/1). Funding Information: The authors gratefully acknowledge the Chinese Government Scholarships (CSC), and the National Natural Science Foundation of China founding (U20A20215 and 61875142), and the Sichuan University funding (2020SCUNG205), and UK{\textquoteright}s? Engineering and Physical Sciences Research Council (EPSRC) funding?of?“The?EPSRC?Future??dvanced?Metrology?Hub”? (EP/P006930/1),? the? funding? of? “?? Multiscale? Digital? Twin-Driven Smart Manufacturing System for High Value-?dded?Products”? (EP/T024844/1),? and? the? funding? of? “Next? Generation Metrology Driven?by?Nanophotonics”?(EP/T02643X/1). Publisher Copyright: {\textcopyright} European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022. All rights reserved.; 22nd International Conference of the European Society for Precision Engineering and Nanotechnology ; Conference date: 30-05-2022 Through 03-06-2022",

year = "2022",

month = may,

day = "30",

language = "English",

pages = "389--392",

editor = "Leach, {Richard K.} and A. Akrofi-Ayesu and C. Nisbet and Dishi Phillips",

booktitle = "European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022",

publisher = "euspen",

address = "United Kingdom",

url = "https://www.euspen.eu/events/22nd-international-conference-exhibition/?subid=22nd-international-conference-exhibition",

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Wang, R, Gao, F, Li, D & Jiang, J 2022, Stereo stitching deflectometry for measurement of specular surface with enlarged aperture. in RK Leach, A Akrofi-Ayesu, C Nisbet & D Phillips (eds), European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022. euspen, pp. 389-392, 22nd International Conference of the European Society for Precision Engineering and Nanotechnology, Geneva, Switzerland, 30/05/22. <https://www.euspen.eu/knowledge-base/ICE22198.pdf>

Stereo stitching deflectometry for measurement of specular surface with enlarged aperture. / Wang, Ruiyang; Gao, Feng; Li, Dahai et al.

European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022. ed. / Richard K. Leach; A. Akrofi-Ayesu; C. Nisbet; Dishi Phillips. euspen, 2022. p. 389-392.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Stereo stitching deflectometry for measurement of specular surface with enlarged aperture

AU - Wang, Ruiyang

AU - Gao, Feng

AU - Li, Dahai

AU - Jiang, Jane

N1 - Conference code: 22

PY - 2022/5/30

Y1 - 2022/5/30

N2 - The measurement aperture of deflectometry is limited by the line of sight from the camera to the screen: only the aperture through which the camera can see the pattern displayed on the screen can be measured. A marker-free stereo stitching deflectometry (SSD) is proposed to enlarge the measurement aperture. The sub-apertures are calculated with a stereo-iterative algorithm, and then stitched together to reconstruct a full-aperture result. The measured area is significantly enlarged compared to conventional stereo deflectometry. We test a high-quality optical flat with 190mm diameter using the proposed SSD and an interferometer. The measurement error of the SSD is below 100nm RMS in comparison to the measurement result of the interferometer.

AB - The measurement aperture of deflectometry is limited by the line of sight from the camera to the screen: only the aperture through which the camera can see the pattern displayed on the screen can be measured. A marker-free stereo stitching deflectometry (SSD) is proposed to enlarge the measurement aperture. The sub-apertures are calculated with a stereo-iterative algorithm, and then stitched together to reconstruct a full-aperture result. The measured area is significantly enlarged compared to conventional stereo deflectometry. We test a high-quality optical flat with 190mm diameter using the proposed SSD and an interferometer. The measurement error of the SSD is below 100nm RMS in comparison to the measurement result of the interferometer.

KW - Optical metrology

KW - deflectometry

KW - sub-aperture stitching

UR - https://www.euspen.eu/resource/geneva-2022-proceedings-full-version/

UR - https://www.euspen.eu/events/22nd-international-conference-exhibition/?subid=22nd-international-conference-exhibition

UR - http://www.scopus.com/inward/record.url?scp=85145551750&partnerID=8YFLogxK

M3 - Conference contribution

SP - 389

EP - 392

BT - European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022

A2 - Leach, Richard K.

A2 - Akrofi-Ayesu, A.

A2 - Nisbet, C.

A2 - Phillips, Dishi

PB - euspen

T2 - 22nd International Conference of the European Society for Precision Engineering and Nanotechnology

Y2 - 30 May 2022 through 3 June 2022

ER -

Stereo stitching deflectometry for measurement of specular surface with enlarged aperture

Abstract

Conference

UN SDGs

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Future Advanced Metrology Hub

Cite this

Stereo stitching deflectometry for measurement of specular surface with enlarged aperture

Abstract

Conference

UN SDGs

Access to Document

Other files and links

Fingerprint

Projects

Future Advanced Metrology Hub

Cite this