Engineering & Materials Science
Ion beams
100%
Structural properties
76%
Electric properties
75%
Annealing
70%
Scattering
66%
Ions
65%
Auger electron spectroscopy
55%
Epitaxial films
53%
Silicides
48%
Spectroscopy
39%
Thin films
33%
Furnaces
31%
Temperature
28%
Silicon
27%
Substrates
24%
Chemistry
Ion Beam
77%
Electrical Property
59%
Point Group C∞V
56%
Annealing
55%
Ion Scattering Spectroscopy
52%
Epitaxial Film
50%
Auger Electron Spectroscopy
40%
Energy
33%
Probe
21%
Ambient Reaction Temperature
19%
Ion
13%
Surface
11%
Physics & Astronomy
ion scattering
56%
ion beams
54%
electrical properties
51%
cleanliness
32%
annealing
28%
silicides
24%
Auger spectroscopy
23%
electron spectroscopy
22%
furnaces
21%
energy
20%
purity
20%
probes
14%
room temperature
13%
silicon
12%
spectroscopy
12%
thin films
12%
temperature
6%