Submicron cutting depth achievement for ultra-precision flycutting machine tool based on supplied pressure controlling

Chenhui An; Ruocheng Wei; Zhenzhong Wang; Shengfei Wang; Yaguo Li; Jian Wang; Qiao Xu; Guoyu Yu

Submicron cutting depth achievement for ultra-precision flycutting machine tool based on supplied pressure controlling

Chenhui An, Ruocheng Wei, Zhenzhong Wang, Shengfei Wang, Yaguo Li, Jian Wang, Qiao Xu, Guoyu Yu

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this paper, a novel and convenient method to achieve submicron cutting depth setting is presented for the flycutting machine tool. Based on the phenomenon that aerostatic bearings are slight deformed under the air pressure, fluid-solid interaction simulations are performed to obtain exact deformations of bearings under different pressures. Furthermore, static measurements show good agreements with the simulations. The flycutting experiments indicate that the displacement of the tool is about 100nm when supplied pressure increases from 0.49MPa to 0.52MPa, which means the submicron cutting depth is achieved by changing the pressure in a small amplitude. This method is significant for machining optical crystals.

Original language	English
Title of host publication	Laser Metrology and Machine Performance XIII
Subtitle of host publication	13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019
Editors	Liam Blunt, Wolfgang Knapp
Publisher	euspen
Pages	156-165
Number of pages	10
ISBN (Print)	9780995775138
Publication status	Published - 1 Nov 2019
Event	13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance - Advanced Manufacturing Research Centre (AMRC), Sheffield, United Kingdom Duration: 13 Mar 2019 → 14 Mar 2019 Conference number: 13 https://www.euspen.eu/events/lamdamap-2019/

Conference

Conference	13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance
Abbreviated title	LAMDAMAP 2019
Country/Territory	United Kingdom
City	Sheffield
Period	13/03/19 → 14/03/19
Internet address	https://www.euspen.eu/events/lamdamap-2019/

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https://www.euspen.eu/knowledge-base/LAM19132.pdfLicence: Unspecified

Cite this

An, C., Wei, R., Wang, Z., Wang, S., Li, Y., Wang, J., Xu, Q., & Yu, G. (2019). Submicron cutting depth achievement for ultra-precision flycutting machine tool based on supplied pressure controlling. In L. Blunt, & W. Knapp (Eds.), Laser Metrology and Machine Performance XIII : 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019 (pp. 156-165). euspen. https://www.euspen.eu/knowledge-base/LAM19132.pdf

An, Chenhui ; Wei, Ruocheng ; Wang, Zhenzhong et al. / Submicron cutting depth achievement for ultra-precision flycutting machine tool based on supplied pressure controlling. Laser Metrology and Machine Performance XIII : 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019. editor / Liam Blunt ; Wolfgang Knapp. euspen, 2019. pp. 156-165

@inproceedings{af2f998391e84c6796681b99b237c6db,

title = "Submicron cutting depth achievement for ultra-precision flycutting machine tool based on supplied pressure controlling",

abstract = "In this paper, a novel and convenient method to achieve submicron cutting depth setting is presented for the flycutting machine tool. Based on the phenomenon that aerostatic bearings are slight deformed under the air pressure, fluid-solid interaction simulations are performed to obtain exact deformations of bearings under different pressures. Furthermore, static measurements show good agreements with the simulations. The flycutting experiments indicate that the displacement of the tool is about 100nm when supplied pressure increases from 0.49MPa to 0.52MPa, which means the submicron cutting depth is achieved by changing the pressure in a small amplitude. This method is significant for machining optical crystals.",

keywords = "Aerostatic spindle, Fluid-solid interaction, Submicro cutting depth, Supplied pressure, Ultra-precesion flycutting",

author = "Chenhui An and Ruocheng Wei and Zhenzhong Wang and Shengfei Wang and Yaguo Li and Jian Wang and Qiao Xu and Guoyu Yu",

note = "Funding Information: This study is supported by the Science Challenge Project, No. JCKY2016212A506. Publisher Copyright: {\textcopyright} Laser Metrology and Machine Performance XIII - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019.; 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019 ; Conference date: 13-03-2019 Through 14-03-2019",

year = "2019",

month = nov,

day = "1",

language = "English",

isbn = "9780995775138",

pages = "156--165",

editor = "Liam Blunt and Wolfgang Knapp",

booktitle = "Laser Metrology and Machine Performance XIII",

publisher = "euspen",

address = "United Kingdom",

url = "https://www.euspen.eu/events/lamdamap-2019/",

}

An, C, Wei, R, Wang, Z, Wang, S, Li, Y, Wang, J, Xu, Q & Yu, G 2019, Submicron cutting depth achievement for ultra-precision flycutting machine tool based on supplied pressure controlling. in L Blunt & W Knapp (eds), Laser Metrology and Machine Performance XIII : 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019. euspen, pp. 156-165, 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, Sheffield, United Kingdom, 13/03/19. <https://www.euspen.eu/knowledge-base/LAM19132.pdf>

Submicron cutting depth achievement for ultra-precision flycutting machine tool based on supplied pressure controlling. / An, Chenhui; Wei, Ruocheng; Wang, Zhenzhong et al.

Laser Metrology and Machine Performance XIII : 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019. ed. / Liam Blunt; Wolfgang Knapp. euspen, 2019. p. 156-165.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Submicron cutting depth achievement for ultra-precision flycutting machine tool based on supplied pressure controlling

AU - An, Chenhui

AU - Wei, Ruocheng

AU - Wang, Zhenzhong

AU - Wang, Shengfei

AU - Li, Yaguo

AU - Wang, Jian

AU - Xu, Qiao

AU - Yu, Guoyu

N1 - Conference code: 13

PY - 2019/11/1

Y1 - 2019/11/1

N2 - In this paper, a novel and convenient method to achieve submicron cutting depth setting is presented for the flycutting machine tool. Based on the phenomenon that aerostatic bearings are slight deformed under the air pressure, fluid-solid interaction simulations are performed to obtain exact deformations of bearings under different pressures. Furthermore, static measurements show good agreements with the simulations. The flycutting experiments indicate that the displacement of the tool is about 100nm when supplied pressure increases from 0.49MPa to 0.52MPa, which means the submicron cutting depth is achieved by changing the pressure in a small amplitude. This method is significant for machining optical crystals.

AB - In this paper, a novel and convenient method to achieve submicron cutting depth setting is presented for the flycutting machine tool. Based on the phenomenon that aerostatic bearings are slight deformed under the air pressure, fluid-solid interaction simulations are performed to obtain exact deformations of bearings under different pressures. Furthermore, static measurements show good agreements with the simulations. The flycutting experiments indicate that the displacement of the tool is about 100nm when supplied pressure increases from 0.49MPa to 0.52MPa, which means the submicron cutting depth is achieved by changing the pressure in a small amplitude. This method is significant for machining optical crystals.

KW - Aerostatic spindle

KW - Fluid-solid interaction

KW - Submicro cutting depth

KW - Supplied pressure

KW - Ultra-precesion flycutting

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UR - https://www.tib.eu/en/search/id/TIBKAT%3A1664976485/Laser-metrology-and-machine-performance-XIII-13th/

M3 - Conference contribution

AN - SCOPUS:85074193911

SN - 9780995775138

SP - 156

EP - 165

BT - Laser Metrology and Machine Performance XIII

A2 - Blunt, Liam

A2 - Knapp, Wolfgang

PB - euspen

T2 - 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance

Y2 - 13 March 2019 through 14 March 2019

ER -

An C, Wei R, Wang Z, Wang S, Li Y, Wang J et al. Submicron cutting depth achievement for ultra-precision flycutting machine tool based on supplied pressure controlling. In Blunt L, Knapp W, editors, Laser Metrology and Machine Performance XIII : 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2019. euspen. 2019. p. 156-165

Submicron cutting depth achievement for ultra-precision flycutting machine tool based on supplied pressure controlling

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