Substrate Influence on Topography and Chemical Composition of Thin Metal Films Produced by Means of Self-Ion Assisted Deposition

SEM, RBS, EDX and EDX mapping were used to characterise rubber and silicon surface modified by means of self-ion assisted deposition (SIAD). It was found that SIAD of Cr, Zr and W are accompanied by incorporating of C, O, Al and Si into a coating, what can promote a creation of observed grainless layers. Modified rubber surfaces have quasi-periodical topography which may be due to build in stress as a result of self-ion bombardment. Evolution of RBS signals from metal and incorporated elements are associated with an intermixing effects in the layer/substrate region.