Substrate Influence on Topography and Chemical Composition of Thin Metal Films Produced by Means of Self-Ion Assisted Deposition

I. S. Tashlykov, V. Vishnyakov, A. Wirth

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Substrate Influence on Topography and Chemical Composition of Thin Metal Films Produced by Means of Self-Ion Assisted Deposition'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemistry