Abstract
The total process cycle time for large ULE® and Zerodur® optics can be improved using a precise and rapid grinding process, with low levels of surface waviness and subsurface damage. In this paper, the amounts of defects beneath ULE® and Zerodur® surfaces ground using a selected grinding mode were compared. The grinding response was characterised by measuring: surface roughness, surface profile and subsurface damage. The observed subsurface damage can be separated into two distinct depth zones, which are: 'process' and 'machine dynamics' related.
Original language | English |
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Pages (from-to) | 12197-12205 |
Number of pages | 9 |
Journal | Optics Express |
Volume | 15 |
Issue number | 19 |
DOIs | |
Publication status | Published - 17 Sep 2007 |
Externally published | Yes |