Subsurface damage in precision ground ULE® and Zerodur® surfaces

X. Tonneliier, P. Morantz, P. Shore, A. Baldwin, R. Evans, D. D. Walker

Research output: Contribution to journalArticle

28 Citations (Scopus)

Abstract

The total process cycle time for large ULE® and Zerodur® optics can be improved using a precise and rapid grinding process, with low levels of surface waviness and subsurface damage. In this paper, the amounts of defects beneath ULE® and Zerodur® surfaces ground using a selected grinding mode were compared. The grinding response was characterised by measuring: surface roughness, surface profile and subsurface damage. The observed subsurface damage can be separated into two distinct depth zones, which are: 'process' and 'machine dynamics' related.

LanguageEnglish
Pages12197-12205
Number of pages9
JournalOptics Express
Volume15
Issue number19
DOIs
Publication statusPublished - 17 Sep 2007
Externally publishedYes

Fingerprint

grinding
damage
surface roughness
optics
cycles
defects
profiles

Cite this

Tonneliier, X., Morantz, P., Shore, P., Baldwin, A., Evans, R., & Walker, D. D. (2007). Subsurface damage in precision ground ULE® and Zerodur® surfaces. Optics Express, 15(19), 12197-12205. https://doi.org/10.1364/OE.15.012197
Tonneliier, X. ; Morantz, P. ; Shore, P. ; Baldwin, A. ; Evans, R. ; Walker, D. D. / Subsurface damage in precision ground ULE® and Zerodur® surfaces. In: Optics Express. 2007 ; Vol. 15, No. 19. pp. 12197-12205.
@article{65292f9d4ed04b61a33b97de3dfe3160,
title = "Subsurface damage in precision ground ULE{\circledR} and Zerodur{\circledR} surfaces",
abstract = "The total process cycle time for large ULE{\circledR} and Zerodur{\circledR} optics can be improved using a precise and rapid grinding process, with low levels of surface waviness and subsurface damage. In this paper, the amounts of defects beneath ULE{\circledR} and Zerodur{\circledR} surfaces ground using a selected grinding mode were compared. The grinding response was characterised by measuring: surface roughness, surface profile and subsurface damage. The observed subsurface damage can be separated into two distinct depth zones, which are: 'process' and 'machine dynamics' related.",
author = "X. Tonneliier and P. Morantz and P. Shore and A. Baldwin and R. Evans and Walker, {D. D.}",
year = "2007",
month = "9",
day = "17",
doi = "10.1364/OE.15.012197",
language = "English",
volume = "15",
pages = "12197--12205",
journal = "Optics Express",
issn = "1094-4087",
publisher = "The Optical Society",
number = "19",

}

Tonneliier, X, Morantz, P, Shore, P, Baldwin, A, Evans, R & Walker, DD 2007, 'Subsurface damage in precision ground ULE® and Zerodur® surfaces', Optics Express, vol. 15, no. 19, pp. 12197-12205. https://doi.org/10.1364/OE.15.012197

Subsurface damage in precision ground ULE® and Zerodur® surfaces. / Tonneliier, X.; Morantz, P.; Shore, P.; Baldwin, A.; Evans, R.; Walker, D. D.

In: Optics Express, Vol. 15, No. 19, 17.09.2007, p. 12197-12205.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Subsurface damage in precision ground ULE® and Zerodur® surfaces

AU - Tonneliier, X.

AU - Morantz, P.

AU - Shore, P.

AU - Baldwin, A.

AU - Evans, R.

AU - Walker, D. D.

PY - 2007/9/17

Y1 - 2007/9/17

N2 - The total process cycle time for large ULE® and Zerodur® optics can be improved using a precise and rapid grinding process, with low levels of surface waviness and subsurface damage. In this paper, the amounts of defects beneath ULE® and Zerodur® surfaces ground using a selected grinding mode were compared. The grinding response was characterised by measuring: surface roughness, surface profile and subsurface damage. The observed subsurface damage can be separated into two distinct depth zones, which are: 'process' and 'machine dynamics' related.

AB - The total process cycle time for large ULE® and Zerodur® optics can be improved using a precise and rapid grinding process, with low levels of surface waviness and subsurface damage. In this paper, the amounts of defects beneath ULE® and Zerodur® surfaces ground using a selected grinding mode were compared. The grinding response was characterised by measuring: surface roughness, surface profile and subsurface damage. The observed subsurface damage can be separated into two distinct depth zones, which are: 'process' and 'machine dynamics' related.

UR - http://www.scopus.com/inward/record.url?scp=34748926887&partnerID=8YFLogxK

U2 - 10.1364/OE.15.012197

DO - 10.1364/OE.15.012197

M3 - Article

VL - 15

SP - 12197

EP - 12205

JO - Optics Express

T2 - Optics Express

JF - Optics Express

SN - 1094-4087

IS - 19

ER -

Tonneliier X, Morantz P, Shore P, Baldwin A, Evans R, Walker DD. Subsurface damage in precision ground ULE® and Zerodur® surfaces. Optics Express. 2007 Sep 17;15(19):12197-12205. https://doi.org/10.1364/OE.15.012197