Subsurface damage in precision ground ULE® and Zerodur® surfaces

X. Tonneliier, P. Morantz, P. Shore, A. Baldwin, R. Evans, D. D. Walker

Research output: Contribution to journalArticlepeer-review

36 Citations (Scopus)


The total process cycle time for large ULE® and Zerodur® optics can be improved using a precise and rapid grinding process, with low levels of surface waviness and subsurface damage. In this paper, the amounts of defects beneath ULE® and Zerodur® surfaces ground using a selected grinding mode were compared. The grinding response was characterised by measuring: surface roughness, surface profile and subsurface damage. The observed subsurface damage can be separated into two distinct depth zones, which are: 'process' and 'machine dynamics' related.

Original languageEnglish
Pages (from-to)12197-12205
Number of pages9
JournalOptics Express
Issue number19
Publication statusPublished - 17 Sep 2007
Externally publishedYes


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