Subsurface damage in precision ground ULE® and Zerodur® surfaces

X. Tonneliier; P. Morantz; P. Shore; A. Baldwin; R. Evans; D. D. Walker

doi:10.1364/OE.15.012197

Subsurface damage in precision ground ULE® and Zerodur® surfaces

X. Tonneliier, P. Morantz, P. Shore, A. Baldwin, R. Evans, D. D. Walker

Research output: Contribution to journal › Article › peer-review

38 Citations (Scopus)

Abstract

The total process cycle time for large ULE® and Zerodur® optics can be improved using a precise and rapid grinding process, with low levels of surface waviness and subsurface damage. In this paper, the amounts of defects beneath ULE® and Zerodur® surfaces ground using a selected grinding mode were compared. The grinding response was characterised by measuring: surface roughness, surface profile and subsurface damage. The observed subsurface damage can be separated into two distinct depth zones, which are: 'process' and 'machine dynamics' related.

Original language	English
Pages (from-to)	12197-12205
Number of pages	9
Journal	Optics Express
Volume	15
Issue number	19
DOIs	https://doi.org/10.1364/OE.15.012197
Publication status	Published - 17 Sep 2007
Externally published	Yes

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AU - Walker, D. D.

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Subsurface damage in precision ground ULE® and Zerodur® surfaces

Abstract

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