Surface damage of crystalline silicon by low fluence femtosecond laser pulses

Y. C. Lam, D. V. Tran, H. Y. Zheng, V. M. Murukeshan, J. C. Chai, D. E. Hardt

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Surface damage of crystalline silicon by low fluence femtosecond laser pulses'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemistry