Surface Features

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

Abstract

This chapter presents, for the first time, a formal introduction to a comprehensive surface feature characterization technique for microelectromechanical systems/microoptoelectromechanical systems (MEMS/MOEMS) and semiconductor devices. It provides a brief introduction to the basic concepts in ISO standards for the characterization of surface texture and then concentrates on the provision of a generalized technology for assessment of MEMS surface features, namely form removal and de-noising, through surface feature extraction and finally to the quantification of surface feature attributes. It intends to provide an enriched surface feature characterization toolkit, for both controlling MEMS/MOEMS manufacturing processes and predicting functional performance of microcomponents that rely on specified surface geometry features
Original languageEnglish
Title of host publicationOptical Inspection of Microsystems
EditorsWolfgang Osten
PublisherCRC Press
Chapter2
Pages51-71
Number of pages21
Edition2nd
ISBN (Electronic)9780429186738
ISBN (Print)9781498779470
DOIs
Publication statusPublished - 9 Jul 2019

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