Surface measurement errors using commercial scanning white light interferometers

Mathematics

• Interferometer 100%
• Scanning 75%
• Measurement Error 62%
• Wavelength 45%
• Gradient 45%
• Atomic Force Microscopy 36%
• Discontinuity 34%
• Systematic Error 27%
• Gratings 27%
• Lens 24%
• Discrepancy 19%
• Vertical 18%
• Profile 16%
• Angle 16%
• Range of data 12%
• Performance 11%

Engineering & Materials Science

• Surface measurement 73%
• Interferometers 72%
• Measurement errors 60%
• Scanning 45%
• Wavelength 34%
• Atomic force microscopy 25%
• Systematic errors 24%
• Lenses 20%

Physics & Astronomy

• interferometers 47%
• gradients 38%
• scanning 37%
• discontinuity 34%
• systematic errors 20%
• acceptability 20%
• wavelengths 18%
• artifacts 18%
• atomic force microscopy 14%
• lenses 14%
• gratings 14%
• profiles 10%
• performance 8%