Surface metrology, a new philosophical approach

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2 Citations (Scopus)


A new philosophical approach to surface metrology is described. This defines surface metrology in terms of user areas of interest, rather than via wavelength bands. This enables measurement problems to be dealt with at an "engineering level" rather than at a "parameter level", which eases the interpretation of results.

Original languageEnglish
Pages (from-to)267-274
Number of pages8
Issue number1-4
Publication statusPublished - May 1986
Externally publishedYes

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