Surface profile measurement using spatially dispersed short coherence interferometry

Mothana A. Hassan, Haydn Martin, Xiangqian Jiang

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Improved online techniques for surface profile measurement can be beneficial in high/ultra-precision manufacturing, in terms of enabling manufacture and reducing costs. This paper introduces a spatially dispersed short-coherence interferometer sourced by a super luminescent diode. This technique uses a broadband light source, which is spatially dispersed across a surface using a reflective grating and a scan lens. In this way, the phase data pertaining to surface at height is spectrally encoded. The light reflected from the surface is interfered with a reference beam in a Michelson interferometer, after which the resulting fringes are interrogated by a spectrometer. Phase shifting interferometry is used to extract the spectrally encoded phase information by analysing four captured frames using a Carré algorithm procedure; in this way, surface height can be determined across a profile on a sample. The short coherent light utilized in this interferometric technique means it has the potential for an application as a remote probe through an optical fibre link. This paper describes the concept of a spatially dispersed short coherence interferometer and provides some of the initial experimental results.

LanguageEnglish
Article numbere024001
JournalSurface Topography: Metrology and Properties
Volume2
Issue number2
DOIs
Publication statusPublished - 1 Apr 2014

Fingerprint

Surface measurement
Interferometry
interferometry
profiles
Interferometers
Michelson interferometers
interferometers
coherent light
Light sources
Spectrometers
Optical fibers
Lenses
Diodes
light sources
manufacturing
optical fibers
diodes
lenses
gratings
spectrometers

Cite this

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Surface profile measurement using spatially dispersed short coherence interferometry. / Hassan, Mothana A.; Martin, Haydn; Jiang, Xiangqian.

In: Surface Topography: Metrology and Properties, Vol. 2, No. 2, e024001, 01.04.2014.

Research output: Contribution to journalArticle

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AU - Martin, Haydn

AU - Jiang, Xiangqian

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