Surface profile measurement using spatially dispersed short coherence interferometry

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7 Citations (Scopus)


Improved online techniques for surface profile measurement can be beneficial in high/ultra-precision manufacturing, in terms of enabling manufacture and reducing costs. This paper introduces a spatially dispersed short-coherence interferometer sourced by a super luminescent diode. This technique uses a broadband light source, which is spatially dispersed across a surface using a reflective grating and a scan lens. In this way, the phase data pertaining to surface at height is spectrally encoded. The light reflected from the surface is interfered with a reference beam in a Michelson interferometer, after which the resulting fringes are interrogated by a spectrometer. Phase shifting interferometry is used to extract the spectrally encoded phase information by analysing four captured frames using a Carré algorithm procedure; in this way, surface height can be determined across a profile on a sample. The short coherent light utilized in this interferometric technique means it has the potential for an application as a remote probe through an optical fibre link. This paper describes the concept of a spatially dispersed short coherence interferometer and provides some of the initial experimental results.

Original languageEnglish
Article numbere024001
Number of pages5
JournalSurface Topography: Metrology and Properties
Issue number2
Early online date23 Jan 2014
Publication statusPublished - 1 Apr 2014
Event11th International Symposium on Measurement Technology and Intelligent Instruments - Aachen, Germany
Duration: 1 Jul 20135 Jul 2013
Conference number: 11


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