Surface roughness and contact angle of bias sputtered CoCrTa film

R. Chandrasekhar, D. J. Mapps, L. Blunt

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Surface roughness of bias sputtered CoCrTa films on glass substrates were studied using an Atomic Force Microscope (AFM) and an interferometer (non contact) optical technique (IOT). Contact angles of the coated disks were measured using a goniometer microscope. Wear tests were performed on the bias sputtered films. The results of these investigations are presented.

Original languageEnglish
Pages (from-to)3681-3683
Number of pages3
JournalIEEE Transactions on Magnetics
Issue number5
Publication statusPublished - Sep 1996
Externally publishedYes


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