Surface roughness and contact angle of bias sputtered CoCrTa film

R. Chandrasekhar; D. J. Mapps; L. Blunt

doi:10.1109/20.538727

Surface roughness and contact angle of bias sputtered CoCrTa film

R. Chandrasekhar, D. J. Mapps, L. Blunt

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

Surface roughness of bias sputtered CoCrTa films on glass substrates were studied using an Atomic Force Microscope (AFM) and an interferometer (non contact) optical technique (IOT). Contact angles of the coated disks were measured using a goniometer microscope. Wear tests were performed on the bias sputtered films. The results of these investigations are presented.

Original language	English
Pages (from-to)	3681-3683
Number of pages	3
Journal	IEEE Transactions on Magnetics
Volume	32
Issue number	5
DOIs	https://doi.org/10.1109/20.538727
Publication status	Published - Sep 1996
Externally published	Yes

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title = "Surface roughness and contact angle of bias sputtered CoCrTa film",

abstract = "Surface roughness of bias sputtered CoCrTa films on glass substrates were studied using an Atomic Force Microscope (AFM) and an interferometer (non contact) optical technique (IOT). Contact angles of the coated disks were measured using a goniometer microscope. Wear tests were performed on the bias sputtered films. The results of these investigations are presented.",

keywords = "Rough surfaces, Surface roughness, Optical films, Atomic force microscopy, Atom optics, Optical microscopy, Optical interferometry, Glass, Substrates, Atomic measurements",

author = "R. Chandrasekhar and Mapps, {D. J.} and L. Blunt",

year = "1996",

month = sep,

doi = "10.1109/20.538727",

language = "English",

volume = "32",

pages = "3681--3683",

journal = "IEEE Transactions on Magnetics",

issn = "0018-9464",

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AU - Chandrasekhar, R.

AU - Mapps, D. J.

AU - Blunt, L.

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N2 - Surface roughness of bias sputtered CoCrTa films on glass substrates were studied using an Atomic Force Microscope (AFM) and an interferometer (non contact) optical technique (IOT). Contact angles of the coated disks were measured using a goniometer microscope. Wear tests were performed on the bias sputtered films. The results of these investigations are presented.

AB - Surface roughness of bias sputtered CoCrTa films on glass substrates were studied using an Atomic Force Microscope (AFM) and an interferometer (non contact) optical technique (IOT). Contact angles of the coated disks were measured using a goniometer microscope. Wear tests were performed on the bias sputtered films. The results of these investigations are presented.

KW - Rough surfaces

KW - Surface roughness

KW - Optical films

KW - Atomic force microscopy

KW - Atom optics

KW - Optical microscopy

KW - Optical interferometry

KW - Glass

KW - Substrates

KW - Atomic measurements

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DO - 10.1109/20.538727

M3 - Article

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EP - 3683

JO - IEEE Transactions on Magnetics

JF - IEEE Transactions on Magnetics

SN - 0018-9464

IS - 5

ER -

Surface roughness and contact angle of bias sputtered CoCrTa film

Abstract

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