Surface Texture Evolution of Fused Silica in a Combined Process of Atmospheric Pressure Plasma Processing and Bonnet Polishing

Engineering & Materials Science

• Plasma applications 100%
• Fused silica 88%
• Atmospheric pressure 70%
• Polishing 69%
• Textures 50%
• Etching 19%
• Surface roughness 14%
• Membranes 7%
• Fabrication 6%
• Substrates 6%

Physics & Astronomy

• polishing 66%
• atmospheric pressure 56%
• textures 52%
• silicon dioxide 48%
• machining 18%
• roughness 14%
• etching 13%
• smoothing 9%
• membranes 6%
• deviation 6%
• requirements 6%
• fabrication 5%

Chemistry

• Polishing 73%
• Plasma 39%
• Pressure 36%
• Crystalline Texture 26%
• Etching 16%
• Error 6%
• Surface 5%
• Purity 4%