The C_iO_i(Si_I)₂ defect in silicon: density functional theory calculations

Engineering & Materials Science

• Density functional theory 100%
• Silicon 52%
• Defects 45%
• Point defects 20%
• Defect density 19%
• Annealing 13%

Chemistry

• Crystal Point Defect 86%
• Annealing 52%
• Density Functional Theory 41%
• Energy 31%

Physics & Astronomy

• density functional theory 51%
• defects 37%
• silicon 35%
• interstitials 28%
• configurations 11%
• point defects 10%
• annealing 6%
• energy 3%