The deformation of thin aluminium films under helium ion bombardment

S. E. Donnelly, G. Debras, J. M. Gilles, A. A. Lucas

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)


Aluminium films 2000 Å thick have been bombarded with various flu-ences of 5 keV He+ ions and the resulting bubble distribution observed by Transmission Electron Microscopy. Scanning Electron Microscopy of the films indicates an areal increase in the unsupported regions of the films, which, if it results from three dimensional swelling of the films, is two orders of magnitude larger than would be calculated from the total bubble volume as observed by T. E. M. In addition features closely resembling blisters observed in bulk materials, form on the supported regions of the film. These blisters like features are thought to result from lateral stresses in the films.
Original languageEnglish
Pages (from-to)57-62
Number of pages6
JournalRadiation Effects and Defects in Solids
Issue number2
Publication statusPublished - 1980
Externally publishedYes


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