Abstract
This paper presents a methodology for validating surface metrology software. Based uncertainty analysis, a set of reference data sets with mathematical correct results, call the type F1 softgauges, have been developed. Special designed profiles can be used to check specification uncertainty and algebra calculation is used to lower method uncertainty. The results shown that specification uncertainties were main uncertainty contributors.
| Original language | English |
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| Pages (from-to) | 643-646 |
| Number of pages | 4 |
| Journal | Key Engineering Materials |
| Volume | 381-382 |
| Publication status | Published - 17 Jul 2008 |