The Design and Use of F1 Softguages for Validating Surface Metrology Software

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Abstract

This paper presents a methodology for validating surface metrology software. Based uncertainty analysis, a set of reference data sets with mathematical correct results, call the type F1 softgauges, have been developed. Special designed profiles can be used to check specification uncertainty and algebra calculation is used to lower method uncertainty. The results shown that specification uncertainties were main uncertainty contributors.

Original languageEnglish
Pages (from-to)643-646
Number of pages4
JournalKey Engineering Materials
Volume381-382
Publication statusPublished - 17 Jul 2008

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