The Design of Inductively Coupled Plasma Jet Processing System for High Power Laser Optics

Duo Li; Bo Wang; X. Jane Jiang

The Design of Inductively Coupled Plasma Jet Processing System for High Power Laser Optics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Large-aperture aspheric and freeform fused silica optics are widely used in the high power laser system such as Inertial Confinement Fusion system for their high quality optical characteristics. Because of its low efficiency and distortion for form accuracy, traditional conformal polishing method is unacceptable to remove the thick sub-surface damage layer induced by grinding stage. Thus, atomspheric inductively coupled plasma processing based on chemical reaction is proposed as a non -contact, high-removal-rate solution to the problem. In the paper, a hybrid five-axis machine tool is designed as a platform of plasma processing, including mechanism design and analysis, control system design, and sensor monitoring integration. Meanwhile, trial processing test is conducted and analysed as a feedback to the system design for stability and better performance.

Original language	English
Title of host publication	Laser Metrology and Machine Performance XI
Subtitle of host publication	11 International Conference and Exhibition on Laser Metrology, Machine Tool, CMM & Robotic Performance
Editors	Liam Blunt, Hans Norgaard Hansen
Place of Publication	Cranfield
Publisher	euspen
Pages	390-397
Number of pages	8
ISBN (Electronic)	9780956679055
Publication status	Published - 1 Mar 2015
Event	11th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance - Huddersfield, United Kingdom Duration: 17 Mar 2015 → 18 Mar 2015 Conference number: 11

Conference

Conference	11th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance
Abbreviated title	LAMDAMAP 2015
Country/Territory	United Kingdom
City	Huddersfield
Period	17/03/15 → 18/03/15

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https://www.tib.eu/en/search/id/tema:TEMA20150603535/The-Design-of-Inductively-Coupled-Plasma-Jet-Processing/Licence: Unspecified

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Li, D., Wang, B., & Jiang, X. J. (2015). The Design of Inductively Coupled Plasma Jet Processing System for High Power Laser Optics. In L. Blunt, & H. N. Hansen (Eds.), Laser Metrology and Machine Performance XI: 11 International Conference and Exhibition on Laser Metrology, Machine Tool, CMM & Robotic Performance (pp. 390-397). euspen. https://www.tib.eu/en/search/id/tema:TEMA20150603535/The-Design-of-Inductively-Coupled-Plasma-Jet-Processing/

@inproceedings{74b87add62854c789f794e45352cce17,

title = "The Design of Inductively Coupled Plasma Jet Processing System for High Power Laser Optics",

abstract = "Large-aperture aspheric and freeform fused silica optics are widely used in the high power laser system such as Inertial Confinement Fusion system for their high quality optical characteristics. Because of its low efficiency and distortion for form accuracy, traditional conformal polishing method is unacceptable to remove the thick sub-surface damage layer induced by grinding stage. Thus, atomspheric inductively coupled plasma processing based on chemical reaction is proposed as a non -contact, high-removal-rate solution to the problem. In the paper, a hybrid five-axis machine tool is designed as a platform of plasma processing, including mechanism design and analysis, control system design, and sensor monitoring integration. Meanwhile, trial processing test is conducted and analysed as a feedback to the system design for stability and better performance.",

keywords = "Hybrid mechanism, Inductively coupled plasma processing, Polishing machine design",

author = "Duo Li and Bo Wang and Jiang, {X. Jane}",

year = "2015",

month = mar,

day = "1",

language = "English",

pages = "390--397",

editor = "Liam Blunt and Hansen, {Hans Norgaard}",

booktitle = "Laser Metrology and Machine Performance XI",

publisher = "euspen",

address = "United Kingdom",

note = "11th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance, LAMDAMAP 2015 ; Conference date: 17-03-2015 Through 18-03-2015",

}

Li, D, Wang, B & Jiang, XJ 2015, The Design of Inductively Coupled Plasma Jet Processing System for High Power Laser Optics. in L Blunt & HN Hansen (eds), Laser Metrology and Machine Performance XI: 11 International Conference and Exhibition on Laser Metrology, Machine Tool, CMM & Robotic Performance. euspen, Cranfield, pp. 390-397, 11th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance, Huddersfield, United Kingdom, 17/03/15. <https://www.tib.eu/en/search/id/tema:TEMA20150603535/The-Design-of-Inductively-Coupled-Plasma-Jet-Processing/>

The Design of Inductively Coupled Plasma Jet Processing System for High Power Laser Optics. / Li, Duo; Wang, Bo; Jiang, X. Jane.

Laser Metrology and Machine Performance XI: 11 International Conference and Exhibition on Laser Metrology, Machine Tool, CMM & Robotic Performance. ed. / Liam Blunt; Hans Norgaard Hansen. Cranfield : euspen, 2015. p. 390-397.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - The Design of Inductively Coupled Plasma Jet Processing System for High Power Laser Optics

AU - Li, Duo

AU - Wang, Bo

AU - Jiang, X. Jane

N1 - Conference code: 11

PY - 2015/3/1

Y1 - 2015/3/1

N2 - Large-aperture aspheric and freeform fused silica optics are widely used in the high power laser system such as Inertial Confinement Fusion system for their high quality optical characteristics. Because of its low efficiency and distortion for form accuracy, traditional conformal polishing method is unacceptable to remove the thick sub-surface damage layer induced by grinding stage. Thus, atomspheric inductively coupled plasma processing based on chemical reaction is proposed as a non -contact, high-removal-rate solution to the problem. In the paper, a hybrid five-axis machine tool is designed as a platform of plasma processing, including mechanism design and analysis, control system design, and sensor monitoring integration. Meanwhile, trial processing test is conducted and analysed as a feedback to the system design for stability and better performance.

AB - Large-aperture aspheric and freeform fused silica optics are widely used in the high power laser system such as Inertial Confinement Fusion system for their high quality optical characteristics. Because of its low efficiency and distortion for form accuracy, traditional conformal polishing method is unacceptable to remove the thick sub-surface damage layer induced by grinding stage. Thus, atomspheric inductively coupled plasma processing based on chemical reaction is proposed as a non -contact, high-removal-rate solution to the problem. In the paper, a hybrid five-axis machine tool is designed as a platform of plasma processing, including mechanism design and analysis, control system design, and sensor monitoring integration. Meanwhile, trial processing test is conducted and analysed as a feedback to the system design for stability and better performance.

KW - Hybrid mechanism

KW - Inductively coupled plasma processing

KW - Polishing machine design

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M3 - Conference contribution

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SP - 390

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BT - Laser Metrology and Machine Performance XI

A2 - Blunt, Liam

A2 - Hansen, Hans Norgaard

PB - euspen

CY - Cranfield

T2 - 11th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance

Y2 - 17 March 2015 through 18 March 2015

ER -

The Design of Inductively Coupled Plasma Jet Processing System for High Power Laser Optics

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