The Design of Inductively Coupled Plasma Jet Processing System for High Power Laser Optics

Duo Li, Bo Wang, X. Jane Jiang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Large-aperture aspheric and freeform fused silica optics are widely used in the high power laser system such as Inertial Confinement Fusion system for their high quality optical characteristics. Because of its low efficiency and distortion for form accuracy, traditional conformal polishing method is unacceptable to remove the thick sub-surface damage layer induced by grinding stage. Thus, atomspheric inductively coupled plasma processing based on chemical reaction is proposed as a non -contact, high-removal-rate solution to the problem. In the paper, a hybrid five-axis machine tool is designed as a platform of plasma processing, including mechanism design and analysis, control system design, and sensor monitoring integration. Meanwhile, trial processing test is conducted and analysed as a feedback to the system design for stability and better performance.

Original languageEnglish
Title of host publicationLaser Metrology and Machine Performance XI
Subtitle of host publication11 International Conference and Exhibition on Laser Metrology, Machine Tool, CMM & Robotic Performance
EditorsLiam Blunt, Hans Norgaard Hansen
Place of PublicationCranfield
Publishereuspen
Pages390-397
Number of pages8
ISBN (Electronic)9780956679055
Publication statusPublished - 1 Mar 2015
Event11th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance - Huddersfield, United Kingdom
Duration: 17 Mar 201518 Mar 2015
Conference number: 11

Conference

Conference11th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance
Abbreviated titleLAMDAMAP 2015
CountryUnited Kingdom
CityHuddersfield
Period17/03/1518/03/15

Fingerprint

high power lasers
plasma jets
optics
control systems design
machine tools
inertial confinement fusion
grinding
polishing
systems engineering
chemical reactions
platforms
apertures
silicon dioxide
damage
sensors

Cite this

Li, D., Wang, B., & Jiang, X. J. (2015). The Design of Inductively Coupled Plasma Jet Processing System for High Power Laser Optics. In L. Blunt, & H. N. Hansen (Eds.), Laser Metrology and Machine Performance XI: 11 International Conference and Exhibition on Laser Metrology, Machine Tool, CMM & Robotic Performance (pp. 390-397). Cranfield: euspen.
Li, Duo ; Wang, Bo ; Jiang, X. Jane. / The Design of Inductively Coupled Plasma Jet Processing System for High Power Laser Optics. Laser Metrology and Machine Performance XI: 11 International Conference and Exhibition on Laser Metrology, Machine Tool, CMM & Robotic Performance. editor / Liam Blunt ; Hans Norgaard Hansen. Cranfield : euspen, 2015. pp. 390-397
@inproceedings{74b87add62854c789f794e45352cce17,
title = "The Design of Inductively Coupled Plasma Jet Processing System for High Power Laser Optics",
abstract = "Large-aperture aspheric and freeform fused silica optics are widely used in the high power laser system such as Inertial Confinement Fusion system for their high quality optical characteristics. Because of its low efficiency and distortion for form accuracy, traditional conformal polishing method is unacceptable to remove the thick sub-surface damage layer induced by grinding stage. Thus, atomspheric inductively coupled plasma processing based on chemical reaction is proposed as a non -contact, high-removal-rate solution to the problem. In the paper, a hybrid five-axis machine tool is designed as a platform of plasma processing, including mechanism design and analysis, control system design, and sensor monitoring integration. Meanwhile, trial processing test is conducted and analysed as a feedback to the system design for stability and better performance.",
keywords = "Hybrid mechanism, Inductively coupled plasma processing, Polishing machine design",
author = "Duo Li and Bo Wang and Jiang, {X. Jane}",
year = "2015",
month = "3",
day = "1",
language = "English",
pages = "390--397",
editor = "Liam Blunt and Hansen, {Hans Norgaard}",
booktitle = "Laser Metrology and Machine Performance XI",
publisher = "euspen",

}

Li, D, Wang, B & Jiang, XJ 2015, The Design of Inductively Coupled Plasma Jet Processing System for High Power Laser Optics. in L Blunt & HN Hansen (eds), Laser Metrology and Machine Performance XI: 11 International Conference and Exhibition on Laser Metrology, Machine Tool, CMM & Robotic Performance. euspen, Cranfield, pp. 390-397, 11th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance, Huddersfield, United Kingdom, 17/03/15.

The Design of Inductively Coupled Plasma Jet Processing System for High Power Laser Optics. / Li, Duo; Wang, Bo; Jiang, X. Jane.

Laser Metrology and Machine Performance XI: 11 International Conference and Exhibition on Laser Metrology, Machine Tool, CMM & Robotic Performance. ed. / Liam Blunt; Hans Norgaard Hansen. Cranfield : euspen, 2015. p. 390-397.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - The Design of Inductively Coupled Plasma Jet Processing System for High Power Laser Optics

AU - Li, Duo

AU - Wang, Bo

AU - Jiang, X. Jane

PY - 2015/3/1

Y1 - 2015/3/1

N2 - Large-aperture aspheric and freeform fused silica optics are widely used in the high power laser system such as Inertial Confinement Fusion system for their high quality optical characteristics. Because of its low efficiency and distortion for form accuracy, traditional conformal polishing method is unacceptable to remove the thick sub-surface damage layer induced by grinding stage. Thus, atomspheric inductively coupled plasma processing based on chemical reaction is proposed as a non -contact, high-removal-rate solution to the problem. In the paper, a hybrid five-axis machine tool is designed as a platform of plasma processing, including mechanism design and analysis, control system design, and sensor monitoring integration. Meanwhile, trial processing test is conducted and analysed as a feedback to the system design for stability and better performance.

AB - Large-aperture aspheric and freeform fused silica optics are widely used in the high power laser system such as Inertial Confinement Fusion system for their high quality optical characteristics. Because of its low efficiency and distortion for form accuracy, traditional conformal polishing method is unacceptable to remove the thick sub-surface damage layer induced by grinding stage. Thus, atomspheric inductively coupled plasma processing based on chemical reaction is proposed as a non -contact, high-removal-rate solution to the problem. In the paper, a hybrid five-axis machine tool is designed as a platform of plasma processing, including mechanism design and analysis, control system design, and sensor monitoring integration. Meanwhile, trial processing test is conducted and analysed as a feedback to the system design for stability and better performance.

KW - Hybrid mechanism

KW - Inductively coupled plasma processing

KW - Polishing machine design

UR - http://www.scopus.com/inward/record.url?scp=84947065314&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84947065314

SP - 390

EP - 397

BT - Laser Metrology and Machine Performance XI

A2 - Blunt, Liam

A2 - Hansen, Hans Norgaard

PB - euspen

CY - Cranfield

ER -

Li D, Wang B, Jiang XJ. The Design of Inductively Coupled Plasma Jet Processing System for High Power Laser Optics. In Blunt L, Hansen HN, editors, Laser Metrology and Machine Performance XI: 11 International Conference and Exhibition on Laser Metrology, Machine Tool, CMM & Robotic Performance. Cranfield: euspen. 2015. p. 390-397