The development of measurement protocol for characterisation of ultra smooth surfaces

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Original languageEnglish
Title of host publicationProceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006
EditorsH. Zervos
Publishereuspen
Pages516-519
Number of pages4
Volume1
ISBN (Electronic)0955308208, 9780955308208
Publication statusPublished - 2006
Event6th International Conference European Society for Precision Engineering and Nanotechnology - Baden bei Wien, Vienna, Austria
Duration: 28 May 20061 Jun 2006
Conference number: 6

Conference

Conference6th International Conference European Society for Precision Engineering and Nanotechnology
Abbreviated titleEUSPEN 2006
CountryAustria
CityVienna
Period28/05/061/06/06

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