The effects of radiation damage and impurities on void dynamics in silicon

S. E. Donnelly, V. M. Vishnyakov, R. C. Birtcher, G. Carter

Research output: Contribution to journalConference article

25 Citations (Scopus)

Abstract

Transmission electron microscopy (TEM) has been used to study the effects of implanted oxygen or carbon on the dynamics of cavity growth in silicon. The cavities are produced by implantation with helium ions followed by annealing to convert small He-filled bubbles into large empty voids. We have also investigated the effects of self-ion damage on cavity growth. Both impurities and self-ion damage can significantly inhibit void growth. In addition, hot stage TEM has been used to elucidate the processes responsible for cavity growth in an attempt to understand the way in which both impurities and radiation damage are able to modify these processes. Cavity growth is seen to be due to Ostwald ripening and coalescence in the early stages with some sporadic, rapid motion of large bubbles leading to coalescence at higher temperatures. Our research indicates that void dynamics in silicon are quite different from those in metallic systems.

LanguageEnglish
Pages132-139
Number of pages8
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume175-177
DOIs
Publication statusPublished - Apr 2001
Externally publishedYes
Event12th International Conference on Ion Beam Modification of Materials - Universidade Federal do Rio Grande do Sul Instituto de Fisica, Rio Grande do Sul, Brazil
Duration: 3 Sep 20008 Sep 2000
Conference number: 12

Fingerprint

Radiation damage
radiation damage
voids
Impurities
Silicon
impurities
cavities
silicon
damage
Coalescence
coalescing
Ions
bubbles
Transmission electron microscopy
Ostwald ripening
transmission electron microscopy
helium ions
Ion implantation
Helium
implantation

Cite this

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abstract = "Transmission electron microscopy (TEM) has been used to study the effects of implanted oxygen or carbon on the dynamics of cavity growth in silicon. The cavities are produced by implantation with helium ions followed by annealing to convert small He-filled bubbles into large empty voids. We have also investigated the effects of self-ion damage on cavity growth. Both impurities and self-ion damage can significantly inhibit void growth. In addition, hot stage TEM has been used to elucidate the processes responsible for cavity growth in an attempt to understand the way in which both impurities and radiation damage are able to modify these processes. Cavity growth is seen to be due to Ostwald ripening and coalescence in the early stages with some sporadic, rapid motion of large bubbles leading to coalescence at higher temperatures. Our research indicates that void dynamics in silicon are quite different from those in metallic systems.",
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AU - Donnelly, S. E.

AU - Vishnyakov, V. M.

AU - Birtcher, R. C.

AU - Carter, G.

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N2 - Transmission electron microscopy (TEM) has been used to study the effects of implanted oxygen or carbon on the dynamics of cavity growth in silicon. The cavities are produced by implantation with helium ions followed by annealing to convert small He-filled bubbles into large empty voids. We have also investigated the effects of self-ion damage on cavity growth. Both impurities and self-ion damage can significantly inhibit void growth. In addition, hot stage TEM has been used to elucidate the processes responsible for cavity growth in an attempt to understand the way in which both impurities and radiation damage are able to modify these processes. Cavity growth is seen to be due to Ostwald ripening and coalescence in the early stages with some sporadic, rapid motion of large bubbles leading to coalescence at higher temperatures. Our research indicates that void dynamics in silicon are quite different from those in metallic systems.

AB - Transmission electron microscopy (TEM) has been used to study the effects of implanted oxygen or carbon on the dynamics of cavity growth in silicon. The cavities are produced by implantation with helium ions followed by annealing to convert small He-filled bubbles into large empty voids. We have also investigated the effects of self-ion damage on cavity growth. Both impurities and self-ion damage can significantly inhibit void growth. In addition, hot stage TEM has been used to elucidate the processes responsible for cavity growth in an attempt to understand the way in which both impurities and radiation damage are able to modify these processes. Cavity growth is seen to be due to Ostwald ripening and coalescence in the early stages with some sporadic, rapid motion of large bubbles leading to coalescence at higher temperatures. Our research indicates that void dynamics in silicon are quite different from those in metallic systems.

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KW - Gettering

KW - Helium

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KW - Voids

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