The Influence of Couple Stress Components and Electrostatic Actuation on Free Vibration Characteristics of Thin Micro-Plates

Amir R. Askari, Masoud Tahani

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


The present paper deals specifically with the frequently asked question of are there any differences between classical non-actuated mode-shapes of plate-type MEMS and the electrically deformed ones obtained by the non-classical modified couple stress theory. To this end, a Kirchhoff's thin plate model together with the modified couple stress theory is considered to extract the eigenvalue problem which governs on free vibrations of the system. Using the free vibration equation of the system, it is proved that neither the electrostatic actuation nor the couple stress components influence on linear mode-shapes of the system. To emphasis on the validity of the present proof, the extended Kantorovich method is employed to provide analytical solutions for an electrically actuated micro-plate with clamped boundary conditions. The solutions, whose accuracy is verified by available results in the literature, also indicate that the linear mode-shapes of an electrically actuated micro-plate are totally independent from the influences of size and electrical loading.

Original languageEnglish
Article number03008
Number of pages5
JournalMATEC Web of Conferences
Early online date22 Apr 2016
Publication statusPublished - 22 Apr 2016
Externally publishedYes
Event7th International Conference on Mechanical, Industrial, and Manufacturing Technologies - Cape Town, South Africa
Duration: 1 Feb 20163 Feb 2016
Conference number: 7

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