TY - JOUR
T1 - The interaction of cavities in silicon with moving amorphous-crystalline interfaces
AU - Gandy, A. S.
AU - Donnelly, S. E.
AU - Beaufort, M. F.
AU - Oliviero, E.
AU - Fichtner, P. F.P.
PY - 2007/4/1
Y1 - 2007/4/1
N2 - A detailed transmission electron microscopy (TEM) study has been carried out on the effect on helium-filled cavities (bubbles), contained entirely within a buried amorphous layer in silicon, of the recrystallisation of the layer by solid-phase epitaxial growth. On annealing to temperatures in the range 550-600 °C, recrystallisation took place at both amorphous-crystalline interfaces which, as they moved, were observed to sweep the cavities, keeping them initially confined within the amorphous region. The recrystallisation also gave rise to the formation of microtwin lamellae which clearly did not nucleate on the bubbles; contrary to previous reports. This paper seeks to explain aspects of the interaction of both cavities and microtwins with the advancing a/c interface in terms of defects within the amorphous layer.
AB - A detailed transmission electron microscopy (TEM) study has been carried out on the effect on helium-filled cavities (bubbles), contained entirely within a buried amorphous layer in silicon, of the recrystallisation of the layer by solid-phase epitaxial growth. On annealing to temperatures in the range 550-600 °C, recrystallisation took place at both amorphous-crystalline interfaces which, as they moved, were observed to sweep the cavities, keeping them initially confined within the amorphous region. The recrystallisation also gave rise to the formation of microtwin lamellae which clearly did not nucleate on the bubbles; contrary to previous reports. This paper seeks to explain aspects of the interaction of both cavities and microtwins with the advancing a/c interface in terms of defects within the amorphous layer.
UR - http://www.scopus.com/inward/record.url?scp=33947728474&partnerID=8YFLogxK
U2 - 10.1016/j.nimb.2007.01.021
DO - 10.1016/j.nimb.2007.01.021
M3 - Article
AN - SCOPUS:33947728474
VL - 257
SP - 177
EP - 180
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
SN - 0168-583X
IS - 1-2
ER -