The use of cavities for gettering in silicon microelectronic devices

S. E. Donnelly, V. M. Vishnyakov, G. Carter, J. Terry, L. I. Haworth, P. Sermanni, R. C. Birtcher

Research output: Contribution to journalConference article

3 Citations (Scopus)

Abstract

This paper presents results from an ongoing three-year project in which the use of microcavities to getter transition metal impurities in silicon-based microelectronic devices has been investigated. The paper reports on the results of a fundamental study of bubble growth mechanisms and on a systematic study of possible detrimental effects of cavity gettering on 1.2 μm p-type metal–oxide-semiconductor field effect transistors.
Original languageEnglish
Pages (from-to)422-426
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume206
Early online date27 Feb 2003
DOIs
Publication statusPublished - May 2003
Externally publishedYes
Event13th International Conference on Ion Beam Modification of Materials - Kobe, Japan
Duration: 1 Sep 20026 Sep 2002
Conference number: 13

Fingerprint

p-type semiconductors
Microcavities
Field effect transistors
microelectronics
Microelectronics
Transition metals
bubbles
field effect transistors
transition metals
Impurities
Semiconductor materials
Silicon
impurities
cavities
silicon

Cite this

@article{7f07a26072b4428db6034c8a9fc27ddb,
title = "The use of cavities for gettering in silicon microelectronic devices",
abstract = "This paper presents results from an ongoing three-year project in which the use of microcavities to getter transition metal impurities in silicon-based microelectronic devices has been investigated. The paper reports on the results of a fundamental study of bubble growth mechanisms and on a systematic study of possible detrimental effects of cavity gettering on 1.2 μm p-type metal–oxide-semiconductor field effect transistors.",
keywords = "Cavities, Gettering, MOSFET devices, Silicon, TEM",
author = "Donnelly, {S. E.} and Vishnyakov, {V. M.} and G. Carter and J. Terry and Haworth, {L. I.} and P. Sermanni and Birtcher, {R. C.}",
year = "2003",
month = "5",
doi = "10.1016/S0168-583X(03)00783-3",
language = "English",
volume = "206",
pages = "422--426",
journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",
issn = "0168-583X",
publisher = "Elsevier",

}

The use of cavities for gettering in silicon microelectronic devices. / Donnelly, S. E.; Vishnyakov, V. M.; Carter, G.; Terry, J.; Haworth, L. I.; Sermanni, P.; Birtcher, R. C.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 206, 05.2003, p. 422-426.

Research output: Contribution to journalConference article

TY - JOUR

T1 - The use of cavities for gettering in silicon microelectronic devices

AU - Donnelly, S. E.

AU - Vishnyakov, V. M.

AU - Carter, G.

AU - Terry, J.

AU - Haworth, L. I.

AU - Sermanni, P.

AU - Birtcher, R. C.

PY - 2003/5

Y1 - 2003/5

N2 - This paper presents results from an ongoing three-year project in which the use of microcavities to getter transition metal impurities in silicon-based microelectronic devices has been investigated. The paper reports on the results of a fundamental study of bubble growth mechanisms and on a systematic study of possible detrimental effects of cavity gettering on 1.2 μm p-type metal–oxide-semiconductor field effect transistors.

AB - This paper presents results from an ongoing three-year project in which the use of microcavities to getter transition metal impurities in silicon-based microelectronic devices has been investigated. The paper reports on the results of a fundamental study of bubble growth mechanisms and on a systematic study of possible detrimental effects of cavity gettering on 1.2 μm p-type metal–oxide-semiconductor field effect transistors.

KW - Cavities

KW - Gettering

KW - MOSFET devices

KW - Silicon

KW - TEM

UR - http://www.scopus.com/inward/record.url?scp=0037568009&partnerID=8YFLogxK

U2 - 10.1016/S0168-583X(03)00783-3

DO - 10.1016/S0168-583X(03)00783-3

M3 - Conference article

VL - 206

SP - 422

EP - 426

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

ER -