Theoretical modeling of ultrasonic cavitation micro-jet impact and experimental study on deburring of crossed V-groove edges

V-groove microstructures are widely used in optics, energy, and electronics due to their excellent functional properties. However, burr formation during ultra-precision machining can significantly compromise surface quality and machining accuracy. This study explores an ultrasonic cavitation deburring method specifically designed for the crossed edges of V-grooves. A theoretical model was established to describe the relationship between the maximum micro-jet impact pressure generated by cavitation bubble collapse and the key process parameters, namely the working gap and ultrasonic amplitude. This model clarifies the burr removal mechanism and defines the critical conditions required for effective deburring. Experiments were conducted to optimize three major parameters: deburring time, ultrasonic amplitude, and working gap. In addition, the influence of cavitation erosion on the surface quality of micro V-grooves was analyzed. The results showed that a burr removal rate of up to 92.1 % was achieved within 40 s, while surface roughness variation was controlled within 15 %.