Abstract
A numerical analysis has been performed to determine the form of evolution rate transients resulting from detrapping and diffusion of gas implanted into a solid substrate (so-called substitutional pop-out) during a linear tempering schedule of the form T = T0 + at. The way in which the temperature for maximum release rate and the e-1 width of the transient vary as a function of the ratio of migration energy, E, to detrapping energy, Q, has been determined for a range of values of detrapping energy, Q, and diffusion starting depth, p. A general criterion has been derived which indicates that the diffusion process plays a significant role when E/Q ≳ 1-0.16 log p.
Original language | English |
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Pages (from-to) | 69-72 |
Number of pages | 4 |
Journal | Vacuum |
Volume | 28 |
Issue number | 2 |
DOIs | |
Publication status | Published - 1 Feb 1978 |
Externally published | Yes |