Abstract
A numerical analysis has been performed to determine the form of evolution rate transients resulting from detrapping and diffusion of gas implanted into a solid substrate (so-called substitutional pop-out) during a linear tempering schedule of the form T = T0 + at. The way in which the temperature for maximum release rate and the e-1 width of the transient vary as a function of the ratio of migration energy, E, to detrapping energy, Q, has been determined for a range of values of detrapping energy, Q, and diffusion starting depth, p. A general criterion has been derived which indicates that the diffusion process plays a significant role when E/Q ≳ 1-0.16 log p.
| Original language | English |
|---|---|
| Pages (from-to) | 69-72 |
| Number of pages | 4 |
| Journal | Vacuum |
| Volume | 28 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 1 Feb 1978 |
| Externally published | Yes |
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Thermal evolution of gas from a solid following detrapping and diffusion during a linear tempering schedule. / Donnelly, SE; Ingram, DC.
In: Vacuum, Vol. 28, No. 2, 01.02.1978, p. 69-72.Research output: Contribution to journal › Article
TY - JOUR
T1 - Thermal evolution of gas from a solid following detrapping and diffusion during a linear tempering schedule
AU - Donnelly, SE
AU - Ingram, DC
PY - 1978/2/1
Y1 - 1978/2/1
N2 - A numerical analysis has been performed to determine the form of evolution rate transients resulting from detrapping and diffusion of gas implanted into a solid substrate (so-called substitutional pop-out) during a linear tempering schedule of the form T = T0 + at. The way in which the temperature for maximum release rate and the e-1 width of the transient vary as a function of the ratio of migration energy, E, to detrapping energy, Q, has been determined for a range of values of detrapping energy, Q, and diffusion starting depth, p. A general criterion has been derived which indicates that the diffusion process plays a significant role when E/Q ≳ 1-0.16 log p.
AB - A numerical analysis has been performed to determine the form of evolution rate transients resulting from detrapping and diffusion of gas implanted into a solid substrate (so-called substitutional pop-out) during a linear tempering schedule of the form T = T0 + at. The way in which the temperature for maximum release rate and the e-1 width of the transient vary as a function of the ratio of migration energy, E, to detrapping energy, Q, has been determined for a range of values of detrapping energy, Q, and diffusion starting depth, p. A general criterion has been derived which indicates that the diffusion process plays a significant role when E/Q ≳ 1-0.16 log p.
UR - http://www.scopus.com/inward/record.url?scp=0017935013&partnerID=8YFLogxK
U2 - 10.1016/S0042-207X(78)80516-8
DO - 10.1016/S0042-207X(78)80516-8
M3 - Article
VL - 28
SP - 69
EP - 72
JO - Vacuum
JF - Vacuum
SN - 0042-207X
IS - 2
ER -