Thermal evolution of gas from a solid following detrapping and diffusion during a linear tempering schedule

SE Donnelly, DC Ingram

Research output: Contribution to journalArticle

Abstract

A numerical analysis has been performed to determine the form of evolution rate transients resulting from detrapping and diffusion of gas implanted into a solid substrate (so-called substitutional pop-out) during a linear tempering schedule of the form T = T0 + at. The way in which the temperature for maximum release rate and the e-1 width of the transient vary as a function of the ratio of migration energy, E, to detrapping energy, Q, has been determined for a range of values of detrapping energy, Q, and diffusion starting depth, p. A general criterion has been derived which indicates that the diffusion process plays a significant role when E/Q ≳ 1-0.16 log p.

Original languageEnglish
Pages (from-to)69-72
Number of pages4
JournalVacuum
Volume28
Issue number2
DOIs
Publication statusPublished - 1 Feb 1978
Externally publishedYes

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