Thin solid film sample preparation by a small-angle cleavage for transmission electron microscopy

Suli Suder; C. A. Faunce; S. E. Donnelly

doi:10.1016/S0040-6090(02)00042-1

Thin solid film sample preparation by a small-angle cleavage for transmission electron microscopy

Suli Suder, C. A. Faunce, S. E. Donnelly

Research output: Contribution to journal › Article › peer-review

14 Citations (Scopus)

Abstract

Thin solid film samples have been prepared by a small-angle cleavage technique using hand tools. Cleaved wedges from the same material are mounted both as plan-view and cross-sectional samples on the same transmission electron microscopy (TEM) specimen grid allowing convenient examination in both views. The samples of Si₃N₄, Zr and Co films deposited on Si prepared by this technique are shown to be suitable for analysis in TEM.

Original language	English
Pages (from-to)	157-159
Number of pages	3
Journal	Thin Solid Films
Volume	304
Issue number	1-2
DOIs	https://doi.org/10.1016/S0040-6090(02)00042-1
Publication status	Published - 1 Jul 1997
Externally published	Yes

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title = "Thin solid film sample preparation by a small-angle cleavage for transmission electron microscopy",

abstract = "Thin solid film samples have been prepared by a small-angle cleavage technique using hand tools. Cleaved wedges from the same material are mounted both as plan-view and cross-sectional samples on the same transmission electron microscopy (TEM) specimen grid allowing convenient examination in both views. The samples of Si3N4, Zr and Co films deposited on Si prepared by this technique are shown to be suitable for analysis in TEM.",

keywords = "Cleavage, Thin solid films, Transmission electron microscopy",

author = "Suli Suder and Faunce, {C. A.} and Donnelly, {S. E.}",

year = "1997",

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T1 - Thin solid film sample preparation by a small-angle cleavage for transmission electron microscopy

AU - Suder, Suli

AU - Faunce, C. A.

AU - Donnelly, S. E.

PY - 1997/7/1

Y1 - 1997/7/1

N2 - Thin solid film samples have been prepared by a small-angle cleavage technique using hand tools. Cleaved wedges from the same material are mounted both as plan-view and cross-sectional samples on the same transmission electron microscopy (TEM) specimen grid allowing convenient examination in both views. The samples of Si3N4, Zr and Co films deposited on Si prepared by this technique are shown to be suitable for analysis in TEM.

AB - Thin solid film samples have been prepared by a small-angle cleavage technique using hand tools. Cleaved wedges from the same material are mounted both as plan-view and cross-sectional samples on the same transmission electron microscopy (TEM) specimen grid allowing convenient examination in both views. The samples of Si3N4, Zr and Co films deposited on Si prepared by this technique are shown to be suitable for analysis in TEM.

KW - Cleavage

KW - Thin solid films

KW - Transmission electron microscopy

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U2 - 10.1016/S0040-6090(02)00042-1

DO - 10.1016/S0040-6090(02)00042-1

M3 - Article

AN - SCOPUS:0031193036

VL - 304

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EP - 159

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

IS - 1-2

ER -

Thin solid film sample preparation by a small-angle cleavage for transmission electron microscopy

Abstract

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