Thin solid film sample preparation by a small-angle cleavage for transmission electron microscopy

Suli Suder, C. A. Faunce, S. E. Donnelly

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Thin solid film samples have been prepared by a small-angle cleavage technique using hand tools. Cleaved wedges from the same material are mounted both as plan-view and cross-sectional samples on the same transmission electron microscopy (TEM) specimen grid allowing convenient examination in both views. The samples of Si3N4, Zr and Co films deposited on Si prepared by this technique are shown to be suitable for analysis in TEM.

Original languageEnglish
Pages (from-to)157-159
Number of pages3
JournalThin Solid Films
Volume304
Issue number1-2
DOIs
Publication statusPublished - 1 Jul 1997
Externally publishedYes

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