Tuned diamond turning of micro-structured surfaces on brittle materials for the improvement of machining efficiency

Zhiwei Zhu, Zhen Tong, Suet To, Xiangqian Jiang

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Target at improving the machining efficiency for diamond turning of micro-structured surfaces on brittle materials, a general technique named tuned diamond turning is proposed through strictly matching the maximum depth-of-cut with the critical one during turning, and the correspondingtoolpath planning algorithm is developed. Practically, a novel piezo-actuated dual-axial fast tool servo system is introduced to realize the tuning concept, and a typical micro-structured surface free from cracks is successfully generated on a single crystal silicon wafer. Compared with fast-/slow tool servo, the machining efficiency is improved by a factor of 16.35%, demonstrating the effectiveness of the tuned diamond turning.

Original languageEnglish
Pages (from-to)559-562
Number of pages4
JournalCIRP Annals
Volume68
Issue number1
Early online date26 Apr 2019
DOIs
Publication statusPublished - 2019

    Fingerprint

Cite this