Abstract
Target at improving the machining efficiency for diamond turning of micro-structured surfaces on brittle materials, a general technique named tuned diamond turning is proposed through strictly matching the maximum depth-of-cut with the critical one during turning, and the correspondingtoolpath planning algorithm is developed. Practically, a novel piezo-actuated dual-axial fast tool servo system is introduced to realize the tuning concept, and a typical micro-structured surface free from cracks is successfully generated on a single crystal silicon wafer. Compared with fast-/slow tool servo, the machining efficiency is improved by a factor of 16.35%, demonstrating the effectiveness of the tuned diamond turning.
| Original language | English |
|---|---|
| Pages (from-to) | 559-562 |
| Number of pages | 4 |
| Journal | CIRP Annals |
| Volume | 68 |
| Issue number | 1 |
| Early online date | 26 Apr 2019 |
| DOIs | |
| Publication status | Published - 2019 |