Two-view small-angle wedge sample preparation by hand tools for transmission electron microscopy of semiconductors and related materials

Suli Suder; C. A. Faunce; S. E. Donnelly

doi:10.1557/proc-480-73

Two-view small-angle wedge sample preparation by hand tools for transmission electron microscopy of semiconductors and related materials

Suli Suder, C. A. Faunce, S. E. Donnelly

Research output: Contribution to journal › Conference article › peer-review

Abstract

Various small-angle wedge two-view samples have been prepared by a small-angle cleavage technique using hand tools and examined by transmission electron microscopy. Cleaved wedges from the same material are mounted both as plan-view and cross-sectional samples on the same TEM specimen grid allowing convenient examination in both views. Samples of Si₃N₄, Zr, Co and TiN/CN/TiN films deposited on Si, and He ion implanted Si prepared by this technique are shown to be suitable for analysis in the TEM.

Original language	English
Pages (from-to)	73-81
Number of pages	9
Journal	Materials Research Society Symposium - Proceedings
Volume	480
Early online date	15 Jul 1997
DOIs	https://doi.org/10.1557/proc-480-73
Publication status	Published - 1 Dec 1997
Externally published	Yes
Event	MRS Spring Symposium: Symposium Z — Specimen Preparation for Transmission Electron Microscopy...IV - San Francisco, United States Duration: 2 Apr 1997 → 2 Apr 1997

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@article{796588a80e6845d8bc5b08112078a33a,

title = "Two-view small-angle wedge sample preparation by hand tools for transmission electron microscopy of semiconductors and related materials",

abstract = "Various small-angle wedge two-view samples have been prepared by a small-angle cleavage technique using hand tools and examined by transmission electron microscopy. Cleaved wedges from the same material are mounted both as plan-view and cross-sectional samples on the same TEM specimen grid allowing convenient examination in both views. Samples of Si3N4, Zr, Co and TiN/CN/TiN films deposited on Si, and He ion implanted Si prepared by this technique are shown to be suitable for analysis in the TEM.",

keywords = "Cobalt, Hand tools, Ion implantation, Metallic films, Semiconducting silicon, Silicon nitride, Titanium nitride, Transmission electron microscopy, Zirconium",

author = "Suli Suder and Faunce, {C. A.} and Donnelly, {S. E.}",

year = "1997",

month = dec,

day = "1",

doi = "10.1557/proc-480-73",

language = "English",

volume = "480",

pages = "73--81",

journal = "MRS Online Proceedings Library",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "MRS Spring Symposium : Symposium Z — Specimen Preparation for Transmission Electron Microscopy...IV ; Conference date: 02-04-1997 Through 02-04-1997",

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TY - JOUR

T1 - Two-view small-angle wedge sample preparation by hand tools for transmission electron microscopy of semiconductors and related materials

AU - Suder, Suli

AU - Faunce, C. A.

AU - Donnelly, S. E.

PY - 1997/12/1

Y1 - 1997/12/1

N2 - Various small-angle wedge two-view samples have been prepared by a small-angle cleavage technique using hand tools and examined by transmission electron microscopy. Cleaved wedges from the same material are mounted both as plan-view and cross-sectional samples on the same TEM specimen grid allowing convenient examination in both views. Samples of Si3N4, Zr, Co and TiN/CN/TiN films deposited on Si, and He ion implanted Si prepared by this technique are shown to be suitable for analysis in the TEM.

AB - Various small-angle wedge two-view samples have been prepared by a small-angle cleavage technique using hand tools and examined by transmission electron microscopy. Cleaved wedges from the same material are mounted both as plan-view and cross-sectional samples on the same TEM specimen grid allowing convenient examination in both views. Samples of Si3N4, Zr, Co and TiN/CN/TiN films deposited on Si, and He ion implanted Si prepared by this technique are shown to be suitable for analysis in the TEM.

KW - Cobalt

KW - Hand tools

KW - Ion implantation

KW - Metallic films

KW - Semiconducting silicon

KW - Silicon nitride

KW - Titanium nitride

KW - Transmission electron microscopy

KW - Zirconium

UR - http://www.scopus.com/inward/record.url?scp=0031373659&partnerID=8YFLogxK

U2 - 10.1557/proc-480-73

DO - 10.1557/proc-480-73

M3 - Conference article

AN - SCOPUS:0031373659

VL - 480

SP - 73

EP - 81

JO - MRS Online Proceedings Library

JF - MRS Online Proceedings Library

SN - 0272-9172

T2 - MRS Spring Symposium

Y2 - 2 April 1997 through 2 April 1997

ER -

Two-view small-angle wedge sample preparation by hand tools for transmission electron microscopy of semiconductors and related materials

Abstract

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