Various small-angle wedge two-view samples have been prepared by a small-angle cleavage technique using hand tools and examined by transmission electron microscopy. Cleaved wedges from the same material are mounted both as plan-view and cross-sectional samples on the same TEM specimen grid allowing convenient examination in both views. Samples of Si3N4, Zr, Co and TiN/CN/TiN films deposited on Si, and He ion implanted Si prepared by this technique are shown to be suitable for analysis in the TEM.
|Number of pages||9|
|Journal||Materials Research Society Symposium - Proceedings|
|Early online date||15 Jul 1997|
|Publication status||Published - 1 Dec 1997|
|Event||MRS Spring Symposium: Symposium Z — Specimen Preparation for Transmission Electron Microscopy...IV - San Francisco, United States|
Duration: 2 Apr 1997 → 2 Apr 1997