Vertical axis non-linearities in wavelength scanning interferometry

Giuseppe Moschetti, Hussam Muhamedsalih, Daniel O'Connor, Xiangqian Jiang, Richard K. Leach

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

The uncertainty of measurements made on an areal surface topography instrument is directly influenced by its metrological characteristics. In this work, the vertical axis deviation from linearity of a wavelength scanning interferometer is evaluated. The vertical axis non-linearities are caused by the spectral leakage resulting from the Fourier transform algorithm for phase slope estimation. These non-linearities are simulated and the results are compared with experimental measurements. In order to reduce the observed non-linearities, a modification of the algorithm is proposed. The application of a Hamming window and the exclusion of edge points in the extracted phase are shown to increase the accuracy over the whole instrument range.

Original languageEnglish
Title of host publicationLaser Metrology and Machine Performance XI - 11th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2015
Publishereuspen
Pages31-39
Number of pages9
ISBN (Electronic)9780956679055
Publication statusPublished - 2015
Event11th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance - , United Kingdom
Duration: 17 Mar 201518 Mar 2015
Conference number: 11

Conference

Conference11th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance
Abbreviated titleLAMDAMAP 2015
CountryUnited Kingdom
Period17/03/1518/03/15

Fingerprint

interferometry
nonlinearity
scanning
wavelengths
exclusion
linearity
topography
leakage
interferometers
slopes
deviation

Cite this

Moschetti, G., Muhamedsalih, H., O'Connor, D., Jiang, X., & Leach, R. K. (2015). Vertical axis non-linearities in wavelength scanning interferometry. In Laser Metrology and Machine Performance XI - 11th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2015 (pp. 31-39). euspen.
Moschetti, Giuseppe ; Muhamedsalih, Hussam ; O'Connor, Daniel ; Jiang, Xiangqian ; Leach, Richard K. / Vertical axis non-linearities in wavelength scanning interferometry. Laser Metrology and Machine Performance XI - 11th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2015. euspen, 2015. pp. 31-39
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title = "Vertical axis non-linearities in wavelength scanning interferometry",
abstract = "The uncertainty of measurements made on an areal surface topography instrument is directly influenced by its metrological characteristics. In this work, the vertical axis deviation from linearity of a wavelength scanning interferometer is evaluated. The vertical axis non-linearities are caused by the spectral leakage resulting from the Fourier transform algorithm for phase slope estimation. These non-linearities are simulated and the results are compared with experimental measurements. In order to reduce the observed non-linearities, a modification of the algorithm is proposed. The application of a Hamming window and the exclusion of edge points in the extracted phase are shown to increase the accuracy over the whole instrument range.",
author = "Giuseppe Moschetti and Hussam Muhamedsalih and Daniel O'Connor and Xiangqian Jiang and Leach, {Richard K.}",
year = "2015",
language = "English",
pages = "31--39",
booktitle = "Laser Metrology and Machine Performance XI - 11th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2015",
publisher = "euspen",

}

Moschetti, G, Muhamedsalih, H, O'Connor, D, Jiang, X & Leach, RK 2015, Vertical axis non-linearities in wavelength scanning interferometry. in Laser Metrology and Machine Performance XI - 11th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2015. euspen, pp. 31-39, 11th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance, United Kingdom, 17/03/15.

Vertical axis non-linearities in wavelength scanning interferometry. / Moschetti, Giuseppe; Muhamedsalih, Hussam; O'Connor, Daniel; Jiang, Xiangqian; Leach, Richard K.

Laser Metrology and Machine Performance XI - 11th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2015. euspen, 2015. p. 31-39.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Vertical axis non-linearities in wavelength scanning interferometry

AU - Moschetti, Giuseppe

AU - Muhamedsalih, Hussam

AU - O'Connor, Daniel

AU - Jiang, Xiangqian

AU - Leach, Richard K.

PY - 2015

Y1 - 2015

N2 - The uncertainty of measurements made on an areal surface topography instrument is directly influenced by its metrological characteristics. In this work, the vertical axis deviation from linearity of a wavelength scanning interferometer is evaluated. The vertical axis non-linearities are caused by the spectral leakage resulting from the Fourier transform algorithm for phase slope estimation. These non-linearities are simulated and the results are compared with experimental measurements. In order to reduce the observed non-linearities, a modification of the algorithm is proposed. The application of a Hamming window and the exclusion of edge points in the extracted phase are shown to increase the accuracy over the whole instrument range.

AB - The uncertainty of measurements made on an areal surface topography instrument is directly influenced by its metrological characteristics. In this work, the vertical axis deviation from linearity of a wavelength scanning interferometer is evaluated. The vertical axis non-linearities are caused by the spectral leakage resulting from the Fourier transform algorithm for phase slope estimation. These non-linearities are simulated and the results are compared with experimental measurements. In order to reduce the observed non-linearities, a modification of the algorithm is proposed. The application of a Hamming window and the exclusion of edge points in the extracted phase are shown to increase the accuracy over the whole instrument range.

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M3 - Conference contribution

SP - 31

EP - 39

BT - Laser Metrology and Machine Performance XI - 11th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2015

PB - euspen

ER -

Moschetti G, Muhamedsalih H, O'Connor D, Jiang X, Leach RK. Vertical axis non-linearities in wavelength scanning interferometry. In Laser Metrology and Machine Performance XI - 11th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2015. euspen. 2015. p. 31-39