Vertical axis non-linearities in wavelength scanning interferometry

Giuseppe Moschetti; Hussam Muhamedsalih; Daniel O'Connor; Xiangqian Jiang; Richard K. Leach

Vertical axis non-linearities in wavelength scanning interferometry

Giuseppe Moschetti, Hussam Muhamedsalih, Daniel O'Connor, Xiangqian Jiang, Richard K. Leach

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

The uncertainty of measurements made on an areal surface topography instrument is directly influenced by its metrological characteristics. In this work, the vertical axis deviation from linearity of a wavelength scanning interferometer is evaluated. The vertical axis non-linearities are caused by the spectral leakage resulting from the Fourier transform algorithm for phase slope estimation. These non-linearities are simulated and the results are compared with experimental measurements. In order to reduce the observed non-linearities, a modification of the algorithm is proposed. The application of a Hamming window and the exclusion of edge points in the extracted phase are shown to increase the accuracy over the whole instrument range.

Original language	English
Title of host publication	Laser Metrology and Machine Performance XI - 11th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2015
Publisher	euspen
Pages	31-39
Number of pages	9
ISBN (Electronic)	9780956679055
Publication status	Published - 2015
Event	11th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance - Huddersfield, United Kingdom Duration: 17 Mar 2015 → 18 Mar 2015 Conference number: 11

Conference

Conference	11th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance
Abbreviated title	LAMDAMAP 2015
Country/Territory	United Kingdom
City	Huddersfield
Period	17/03/15 → 18/03/15

Cite this

@inproceedings{3eaaf2f03dd7437ab51730119dfe5949,

title = "Vertical axis non-linearities in wavelength scanning interferometry",

abstract = "The uncertainty of measurements made on an areal surface topography instrument is directly influenced by its metrological characteristics. In this work, the vertical axis deviation from linearity of a wavelength scanning interferometer is evaluated. The vertical axis non-linearities are caused by the spectral leakage resulting from the Fourier transform algorithm for phase slope estimation. These non-linearities are simulated and the results are compared with experimental measurements. In order to reduce the observed non-linearities, a modification of the algorithm is proposed. The application of a Hamming window and the exclusion of edge points in the extracted phase are shown to increase the accuracy over the whole instrument range.",

author = "Giuseppe Moschetti and Hussam Muhamedsalih and Daniel O'Connor and Xiangqian Jiang and Leach, {Richard K.}",

year = "2015",

language = "English",

pages = "31--39",

booktitle = "Laser Metrology and Machine Performance XI - 11th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2015",

publisher = "euspen",

address = "United Kingdom",

note = "11th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance, LAMDAMAP 2015 ; Conference date: 17-03-2015 Through 18-03-2015",

}

Moschetti, G, Muhamedsalih, H, O'Connor, D, Jiang, X & Leach, RK 2015, Vertical axis non-linearities in wavelength scanning interferometry. in Laser Metrology and Machine Performance XI - 11th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2015. euspen, pp. 31-39, 11th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance, Huddersfield, United Kingdom, 17/03/15.

Vertical axis non-linearities in wavelength scanning interferometry. / Moschetti, Giuseppe; Muhamedsalih, Hussam; O'Connor, Daniel et al.
Laser Metrology and Machine Performance XI - 11th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2015. euspen, 2015. p. 31-39.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Vertical axis non-linearities in wavelength scanning interferometry

AU - Moschetti, Giuseppe

AU - Muhamedsalih, Hussam

AU - O'Connor, Daniel

AU - Jiang, Xiangqian

AU - Leach, Richard K.

N1 - Conference code: 11

PY - 2015

Y1 - 2015

N2 - The uncertainty of measurements made on an areal surface topography instrument is directly influenced by its metrological characteristics. In this work, the vertical axis deviation from linearity of a wavelength scanning interferometer is evaluated. The vertical axis non-linearities are caused by the spectral leakage resulting from the Fourier transform algorithm for phase slope estimation. These non-linearities are simulated and the results are compared with experimental measurements. In order to reduce the observed non-linearities, a modification of the algorithm is proposed. The application of a Hamming window and the exclusion of edge points in the extracted phase are shown to increase the accuracy over the whole instrument range.

AB - The uncertainty of measurements made on an areal surface topography instrument is directly influenced by its metrological characteristics. In this work, the vertical axis deviation from linearity of a wavelength scanning interferometer is evaluated. The vertical axis non-linearities are caused by the spectral leakage resulting from the Fourier transform algorithm for phase slope estimation. These non-linearities are simulated and the results are compared with experimental measurements. In order to reduce the observed non-linearities, a modification of the algorithm is proposed. The application of a Hamming window and the exclusion of edge points in the extracted phase are shown to increase the accuracy over the whole instrument range.

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M3 - Conference contribution

AN - SCOPUS:84940652050

SP - 31

EP - 39

BT - Laser Metrology and Machine Performance XI - 11th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2015

PB - euspen

T2 - 11th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance

Y2 - 17 March 2015 through 18 March 2015

ER -

Vertical axis non-linearities in wavelength scanning interferometry

Abstract

Conference

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