Vibration Compensating Beam Scanning Interferometer for Surface Measurement

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

Light beam scanning using a dispersive element and wavelength tuning is coupled with fiber-optic interferometry to realize a new surface measurement instrument. The instrument is capable of measuring nanoscale surface structures and form deviations. It features active vibration compensation and a small optical probe size that may be placed remotely from the main apparatus. Active vibration compensation is provided by the multiplexing of two interferometers with near common paths. Closed loop control of a mirror mounted on a piezoelectric transducer is used to keep the path length stable. Experiments were carried out to deduce the effectiveness of the vibration compensation and the ability to carry out a real measurement in the face of large environmental disturbance.

Original languageEnglish
Pages (from-to)888-893
Number of pages6
JournalApplied Optics
Volume47
Issue number7
DOIs
Publication statusPublished - Mar 2008

Fingerprint

Surface measurement
Interferometers
interferometers
Scanning
vibration
scanning
Piezoelectric transducers
piezoelectric transducers
multiplexing
Multiplexing
Interferometry
light beams
Surface structure
Fiber optics
fiber optics
interferometry
Mirrors
disturbances
Tuning
tuning

Cite this

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Vibration Compensating Beam Scanning Interferometer for Surface Measurement. / Martin, Haydn; Jiang, Xiangqian; Wang, Kaiwei.

In: Applied Optics, Vol. 47, No. 7, 03.2008, p. 888-893.

Research output: Contribution to journalArticle

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