Abstract
The formation of VO (A-center), VV and VO2 defects in irradiated Czochralski-grown silicon (Si) is of technological importance. Recent theoretical studies have examined the formation and charge states of the A-center in detail. Here we use density functional theory employing hybrid functionals to analyze the formation of VV and VO2 defects. The formation energy as a function of the Fermi energy is calculated for all possible charge states. For the VV and VO2 defects double negatively charged and neutral states dominate, respectively.
Original language | English |
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Pages (from-to) | 1568-1571 |
Number of pages | 4 |
Journal | Journal of Materials Science: Materials in Electronics |
Volume | 26 |
Issue number | 3 |
Early online date | 7 Dec 2014 |
DOIs | |
Publication status | Published - 1 Mar 2015 |
Externally published | Yes |