Abstract
The formation of VO (A-center), VV and VO2 defects in irradiated Czochralski-grown silicon (Si) is of technological importance. Recent theoretical studies have examined the formation and charge states of the A-center in detail. Here we use density functional theory employing hybrid functionals to analyze the formation of VV and VO2 defects. The formation energy as a function of the Fermi energy is calculated for all possible charge states. For the VV and VO2 defects double negatively charged and neutral states dominate, respectively.
| Original language | English |
|---|---|
| Pages (from-to) | 1568-1571 |
| Number of pages | 4 |
| Journal | Journal of Materials Science: Materials in Electronics |
| Volume | 26 |
| Issue number | 3 |
| Early online date | 7 Dec 2014 |
| DOIs | |
| Publication status | Published - 1 Mar 2015 |
| Externally published | Yes |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 7 Affordable and Clean Energy
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