Wavelength scanning interferometer for structured surfaces

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Original languageEnglish
Title of host publicationProceedings - ASPE Summer Topical Meeting on Precision Interferometric Metrology, ASPE 2010
Pages11-15
Number of pages5
Volume49
Publication statusPublished - 1 Dec 2010
EventAmerican Society for Precision Engineering Topical Meeting on Precision Interferometric Metrology - The Crowne Plaza, Asheville, United States
Duration: 23 Jun 201025 Jun 2010
http://www.aspe.net/meetings/2010_Summer/ASPE_Summer_Program.pdf (Link to Event Programme)

Conference

ConferenceAmerican Society for Precision Engineering Topical Meeting on Precision Interferometric Metrology
Abbreviated titleASPE 2010
Country/TerritoryUnited States
CityAsheville
Period23/06/1025/06/10
Internet address

Cite this