Weak-beam dark-field electron tomography of dislocations in GaN

J. S. Barnard; J. Sharp; J. R. Tong; P. A. Midgley

doi:10.1088/1742-6596/26/1/059

Weak-beam dark-field electron tomography of dislocations in GaN

J. S. Barnard, J. Sharp, J. R. Tong, P. A. Midgley

Research output: Contribution to journal › Conference article › peer-review

17 Citations (Scopus)

Abstract

By combining weak-beam dark-field imaging with tomography, we have been able to reconstruct the three-dimensional structure of dislocation arrays in GaN. With a mixture of both threading and in-plane dislocations, owing to plastic relaxation of the film, we look at how well each dislocation is reconstructed and what limits are imposed by way of dislocation density and material anisotropy.

Original language	English
Article number	059
Pages (from-to)	247-250
Number of pages	4
Journal	Journal of Physics: Conference Series
Volume	26
Issue number	1
Early online date	27 Feb 2006
DOIs	https://doi.org/10.1088/1742-6596/26/1/059
Publication status	Published - 27 Feb 2006
Externally published	Yes
Event	Imaging, Analysis and Fabrication on the Nanoscale - University of Leeds, Leeds, United Kingdom Duration: 31 Aug 2005 → 2 Sep 2005

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AU - Sharp, J.

AU - Tong, J. R.

AU - Midgley, P. A.

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N2 - By combining weak-beam dark-field imaging with tomography, we have been able to reconstruct the three-dimensional structure of dislocation arrays in GaN. With a mixture of both threading and in-plane dislocations, owing to plastic relaxation of the film, we look at how well each dislocation is reconstructed and what limits are imposed by way of dislocation density and material anisotropy.

AB - By combining weak-beam dark-field imaging with tomography, we have been able to reconstruct the three-dimensional structure of dislocation arrays in GaN. With a mixture of both threading and in-plane dislocations, owing to plastic relaxation of the film, we look at how well each dislocation is reconstructed and what limits are imposed by way of dislocation density and material anisotropy.

KW - Tomography

KW - weak-beam imaging

KW - Electron beam

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Y2 - 31 August 2005 through 2 September 2005

ER -

Weak-beam dark-field electron tomography of dislocations in GaN

Abstract

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